Hydrogen Etching Process of 4H-SiC (0001) in Limited Regions

Autor: Mancuso, Alfio, Boninelli, Simona, Camarda, Massimo, Fiorenza, Patrick, Mio, Antonio, Scuderi, Viviana, Godignon, Philippe, Aslanidou, Sofia, Calcagno, Lucia, La Via, Francesco

Publikováno v: Diffusion and Defect Data Part B: Solid State Phenomena; August 2024, Vol. 359 Issue: 1 p137-143, 7p