Zobrazeno 1 - 10
of 72
pro vyhledávání: '"Manakli, S."'
Autor:
Hamioud, K., Arnal, V., Farcy, A., Jousseaume, V., Zenasni, A., Icard, B., Pradelles, J., Manakli, S., Brun, Ph., Imbert, G., Jayet, C., Assous, M., Maitrejean, S., Galpin, D., Monget, C., Guillan, J., Chhun, S., Richard, E., Barbier, D., Haond, M.
Publikováno v:
In Microelectronic Engineering 2010 87(3):316-320
Publikováno v:
In Microelectronic Engineering 2006 83(4):749-753
Autor:
Weidenmueller, U., Hahmann, P., Pain, L., Jurdit, M., Henry, D., Laplanche, Y., Manakli, S., Todeschini, J.
Publikováno v:
In Microelectronic Engineering 2005 78:16-21
Publikováno v:
In Microelectronic Engineering 2003 67:70-77
Autor:
Manakli, S. ∗, Trouiller, Y., Schiavone, P., Spinelli, P., Le-Borgne, O., Chollet, J.-P., Rody, Y., Goirand, P.-J.
Publikováno v:
In Microelectronic Engineering 2002 61:123-132
Publikováno v:
Journal of Microlithography Microfabrication and Microsystems
Journal of Microlithography Microfabrication and Microsystems, International Society for Optical Engineering, 2004, 3, pp.2
Journal of Microlithography Microfabrication and Microsystems, 2004, 3, pp.2
Journal of Microlithography Microfabrication and Microsystems, International Society for Optical Engineering, 2004, 3, pp.2
Journal of Microlithography Microfabrication and Microsystems, 2004, 3, pp.2
International audience
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::077c906cb9b48b6094ecfc6a27d78374
https://hal.archives-ouvertes.fr/hal-00477254
https://hal.archives-ouvertes.fr/hal-00477254
Publikováno v:
SPIE'S 2003, Symposium on Microlithography
SPIE'S 2003, Symposium on Microlithography, 2003, United States
SPIE'S 2003, Symposium on Microlithography, 2003, United States
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::44b106cf42e09b25d5adcf1675fcfc0b
https://hal.archives-ouvertes.fr/hal-00484653
https://hal.archives-ouvertes.fr/hal-00484653
Publikováno v:
22nd Annual BACUS Symposium on Photomask Technology
22nd Annual BACUS Symposium on Photomask Technology, 2002, Monterey, United States
22nd Annual BACUS Symposium on Photomask Technology, 2002, Monterey, United States
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::2b412adadfdf02d72050487d87a7fccb
https://hal.archives-ouvertes.fr/hal-00484520
https://hal.archives-ouvertes.fr/hal-00484520
Autor:
Manakli, S., Trouiller, Y., Schiavone, P., Spinelli, P., Le Borgne, O., Chollet, J. P., Rody, Y., Goirand, P.J
Publikováno v:
Microelectronic Engineering
Microelectronic Engineering, 2002, vol. 61-62, pp. 123-132
Microelectronic Engineering, Elsevier, 2002, vol. 61-62, pp. 123-132
Microelectronic Engineering, 2002, vol. 61-62, pp. 123-132
Microelectronic Engineering, Elsevier, 2002, vol. 61-62, pp. 123-132
International audience
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::4aa323281a1f23883270658e62c40fc0
https://hal.archives-ouvertes.fr/hal-00475804
https://hal.archives-ouvertes.fr/hal-00475804
Autor:
Manakli, S., Trouiller, Y., Toublan, O., Schiavone, P., Miramond, C., Rody, Y., Sundermann, F., Chapon, J.D, Goirand, P.J
Publikováno v:
SPIE'S 2002, Symposium on Microlithography
SPIE'S 2002, Symposium on Microlithography, 2002, United States
SPIE'S 2002, Symposium on Microlithography, 2002, United States
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::14c2e1baeae012dda24716c5bafa6ad3
https://hal.science/hal-00484506
https://hal.science/hal-00484506