Výsledky vyhledávání - "Manabu Tsujimura"

Autor: Manabu Tsujimura

Publikováno v: Japanese Journal of Applied Physics. 61:SJ0801

Since the invention of the transistor in 1947, semiconductors have seen phenomenal development in accordance with Moore’s Law G. E. Moore, Electronics 38, 19, (1965), which is based on Dennard’s theory R. H. Dennard, et al. IEEE J. Solid-State Ci

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::05c60ec1e4ccfa9080f8f39f68ef5c71
https://doi.org/10.35848/1347-4065/ac571c

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Shear Stress Analyses in Chemical Mechanical Planarization with Cu/Porous Low-kStructure

Autor: Masako Kodera, Akira Fukuda, Hirokuni Hiyama, Manabu Tsujimura, Yoshihiro Mochizuki

Publikováno v: Japanese Journal of Applied Physics. 46:1974-1980

In current LSI devices, porous low-k films are adopted as interlayer dielectrics (ILDs). However, the extremely low Young's moduli of these films result in defects such as delamination, which are sometimes induced during chemical mechanical planariza

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::df784cb388899c6820ec06fea0a393b6
https://doi.org/10.1143/jjap.46.1974

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