Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Man-Sug Kang"'
Autor:
Jong Duk Lee, Young-Wug Kim, Jae Sung Sim, Won Seong Lee, Sung In Hong, Seung-Woo Lee, Man-Sug Kang, Kwang-Pyuk Suh, Byung-Gook Park, In-Ho Nam
Publikováno v:
IEEE Transactions on Electron Devices. 48:2310-2316
Nitrogen implantation on the silicon substrate was performed before the gate oxidation at a fixed energy of 30 keV and with the split dose of 1.0/spl times/10/sup 14//cm/sup 2/ and 2.0/spl times/10/sup 14//cm/sup 2/. Initial O/sub 2/ injection method
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::437dc283452c346e84539b27d9420498
https://doi.org/10.1109/16.954470
https://doi.org/10.1109/16.954470
Publikováno v:
ECS Meeting Abstracts. :1380-1380
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::423c1857bc60330dc65182128ca7c030
https://doi.org/10.1149/ma2010-02/19/1380
https://doi.org/10.1149/ma2010-02/19/1380
Autor:
Young-Jin Kim, Seung-Sik Chung, Jong-Beom Seo, Beom-Jong Kim, Jae-Young Park, Man-Sug Kang, Han-Jin Lim, Seok-Woo Nam, Tae-Hyuk Ahn
Publikováno v:
ECS Meeting Abstracts. :1005-1005
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::af1ad27007fff8703b541f79cb20109d
https://doi.org/10.1149/ma2007-02/17/1005
https://doi.org/10.1149/ma2007-02/17/1005