Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Mamoru Konishi"'
Publikováno v:
Shokubutsu Kojo Gakkaishi. 6:225-233
Autor:
Shingo Kadomura, Mamoru Konishi, Seiji Samukawa, Akito Nishitani, Butsurin Jinnai, Jun Hashimoto, Hiroto Ohtake, Toshiyuki Orita, Yoshinari Ichihashi
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 25:1808
The authors investigated charge accumulation in high-aspect-ratio contact-hole structures by using the new on-wafer monitoring device they fabricated on a Si substrate of 8in. in diameter by using a conventional production process for semiconductor d
Publikováno v:
Japanese Journal of Applied Physics. 29:2236
Thermally stimulated desorption and X-ray photoelectron spectroscopy were used to study the adsorptive condition of reactive-ion-etched SiO2 and PSG surfaces. Its relationship to the different reactivity between SiO2 and PSG under the condition of hi