Determination of Si - Native SiO2 interface surface state density of SOI-nanowire sensors.

Autor: Malyarenko, Nikolay F., Naumova, Olga V., Fomin, Boris I., Zhanaev, Erdem D., Popov, Vladimir P.

Publikováno v: 2014 15th International Conference of Young Specialists on Micro/Nanotechnologies & Electron Devices (EDM); 2014, p42-44, 3p