Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Mallmann, Joerg"'
Autor:
Burkhardt, Martin, van Lare, Claire, Santaclara, J. G., Peeters, Rudy, van Ballegoij, Rob, Lok, Sjoerd, van Schoot, Jan, Graeupner, Paul, Kuerz, Peter, Mallmann, Joerg, Storms, Greet, Vanoppen, Peter
Publikováno v:
Proceedings of SPIE; April 2024, Vol. 12953 Issue: 1 p129530P-129530P-7, 1165778p
Autor:
Shigemori, Kazuhito, Wang, Suping, Tedeschi, Len, Tanriseven, Gazi, Maas, Raymond, Verspaget, Coen, Marechal, Ruud, Lammers, Ad, Mallmann, Joerg, Harumoto, Masahiko, Hisai, Akihiro, Asai, Masaya
Publikováno v:
Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72732B-72732B-13, 13p
Correlation of EUV resist performance metrics in micro-exposure and full-field EUV projection tools.
Autor:
Wallow, Thomas I., Pierson, Bill, Mizuno, Hiroyuki, Fumar-Pici, Anita, Petrillo, Karen, Anderson, Chris N., Naulleau, Patrick P., Hansen, Steven G., Deng, Yunfei, van Ingen Schenau, Koen, Koay, Chiew-Seng, Ohara, Linda, Han, Sang-In, Watso, Robert, Huli, Lior, Burkhardt, Martin, Wood, Obert, Mallmann, Joerg, Kessels, Bart, Routh, Robert
Publikováno v:
Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72733T-72733T-11, 11p
Autor:
Panning, Eric M., Goldberg, Kenneth A., Pirati, Alberto, Peeters, Rudy, Smith, Daniel, Lok, Sjoerd, van Noordenburg, Martijn, van Es, Roderik, Verhoeven, Eric, Meijer, Henk, Minnaert, Arthur, van der Horst, Jan-Willem, Meiling, Hans, Mallmann, Joerg, Wagner, Christian, Stoeldraijer, Judon, Fisser, Geert, Finders, Jo, Zoldesi, Carmen, Stamm, Uwe, Boom, Herman, Brandt, David, Brown, Daniel, Fomenkov, Igor, Purvis, Michael
Publikováno v:
Proceedings of SPIE; March 2016, Vol. 9776 Issue: 1 p97760A-97760A-15, 9678256p
Autor:
Felix, Nelson M., Lio, Anna, Wischmeier, Lars, Graeupner, Paul, Kuerz, Peter, Kaiser, Winfried, van Schoot, Jan, Mallmann, Joerg, de Pee, Joost, Stoeldraijer, Judon
Publikováno v:
Proceedings of SPIE; 1/21/2020, Vol. 11323, p1132308-1132308, 1p