Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Malankin, Evgeny"'
Autor:
Behringer, Uwe F., Finders, Jo, Armeanu, Ana-Maria, Pellens, Nick, Philipsen, Vicky, Malankin, Evgeny, Xu, Dongbo, Mizuuchi, Keisuke, Curvacho, Gabriel, Wei, Chih-I, Lafferty, Neal, Fenger, Germain
Publikováno v:
Proceedings of SPIE; September 2024, Vol. 13273 Issue: 1 p132731M-132731M-13, 13140383p
Autor:
Kim, Ryoung-Han, Lafferty, Neal V., Armeanu, Ana-Maria, Malankin, Evgeny, Lafferty, Neal, Wei, Chih-I, Kempsell Sears, Monica, Fenger, Germain, Zhang, Xima, Gillijns, Werner, Trivkovic, Darko, Kim, Ryoung-han, Lee, Jeonghoon
Publikováno v:
Proceedings of SPIE; April 2023, Vol. 12495 Issue: 1 p124950A-124950A-12, 12370063p
Autor:
Kim, Ryoung-Han, Lafferty, Neal V., Lee, Jeonghoon, Halder, Sandip, Pham, Van Tuong, Fallica, Roberto, Heo, Seonggil, Sah, Kaushik, Suh, Hyo Seon, Blanco, Victor, Gillijns, Werner, Cross, Andrew, Maguire, Ethan, Armeanu, Ana-Maria, Liubich, Vladislav, Malankin, Evgeny, Zhang, Xima, Sears, Monica Kempsell, Lafferty, Neal, Fenger, Germain, Wei, Chih-I, Kim, Ryoung Han
Publikováno v:
Proceedings of SPIE; April 2023, Vol. 12495 Issue: 1 p124950S-124950S-11, 12370062p
Autor:
Lee, Jeonghoon, Halder, Sandip, Pham, Van Tuong, Fallica, Roberto, Heo, Seonggil, Sah, Kaushik, Suh, Hyo Seon, Blanco, Victor, Gillijns, Werner, Cross, Andrew, Maguire, Ethan, Armeanu, Ana-Maria, Liubich, Vladislav, Malankin, Evgeny, Zhang, Xima, Sears, Monica Kempsell, Lafferty, Neal, Fenger, Germain, Wei, Chih-I, Kim, Ryoung Han
Publikováno v:
Proceedings of SPIE; 4/8/2023, Vol. 12495, p124950S-124950S-11, 1p
Application of resolution enhancement techniques at high NA EUV for next generation DRAM patterning.
Autor:
Armeanu, Ana-Maria, Malankin, Evgeny, Lafferty, Neal, Wei, Chih-I, Kempsell Sears, Monica, Fenger, Germain, Zhang, Xima, Gillijns, Werner, Trivkovic, Darko, Kim, Ryoung-han, Lee, Jeonghoon
Publikováno v:
Proceedings of SPIE; 4/8/2023, Vol. 12495, p124950A-124950A-12, 1p
Autor:
Malankin, Evgeny, Lafferty, Neal, Silakov, Mikhail, Semenova, Ekaterina, Komaki, Takamitsu, Fujii, Kouichi, Miura, Taisuke, Niimi, Gouta, Yamazaki, Taku
Publikováno v:
Proceedings of SPIE; 1/19/2022, Vol. 12052, p1205205-1205205, 1p
Autor:
Kim, Ryoung-Han, Lafferty, Neal V., Malankin, Evgeny, Lafferty, Neal, Silakov, Mikhail, Semenova, Ekaterina, Komaki, Takamitsu, Fujii, Kouichi, Miura, Taisuke, Niimi, Gouta, Yamazaki, Taku
Publikováno v:
Proceedings of SPIE; May 2022, Vol. 12052 Issue: 1 p1205205-1205205-9
Publikováno v:
IOP Conference Series: Materials Science and Engineering; October 2016, Vol. 151 Issue: 1 p012014-012014, 1p