Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Malamine Sanogo"'
Autor:
J.-L. Grolier, S. Delabriere, Bruno Delahaye, F. Domart, Jean-Luc Baltzinger, P. Boissy, Malamine Sanogo, A. Zinger, G. Richou
Publikováno v:
2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Due to device degradations, the metallic contamination is monitored in semiconductor manufacturing lines with analysis of the incoming products and in-line electrical characterization. Some intermittent gate disturb fallout was observed on flash memo