Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Makoto Ryoji"'
Publikováno v:
Wear. 253:331-338
Tribological behaviors of Si-containing diamond-like carbon (DLC) and DLC films deposited by an electron beam excited plasma (EBEP)–CVD system were investigated for applications to mechanical components. The ball-on-disc tests against bearing steel
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::65cc692991454a0542b5d78929cb9893
https://doi.org/10.1016/s0043-1648(02)00156-4
https://doi.org/10.1016/s0043-1648(02)00156-4
Publikováno v:
Diamond and Related Materials. 11:1353-1359
An electron beam excited plasma (EBEP) system can produce a high-density plasma by introducing a high-current and low-energy electron beam into a process chamber. Diamond-like carbon (DLC) films prepared by EBEP-CVD systems were investigated for depo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7c860c1d1b9078739187e7df07b424b8
https://doi.org/10.1016/s0925-9635(01)00743-9
https://doi.org/10.1016/s0925-9635(01)00743-9
Publikováno v:
Solar Energy Materials and Solar Cells. 49:81-88
Hydrogenated microcrystalline silicon (μc-Si:H) films were deposited by electron beam excited plasma (EBEP) CVD. As the SiH4 flow rate increases, deposition rate steeply increases, however, crystalline fraction and grain size decrease. A high deposi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7edaa8b75d1a205a656f63e93d2e4a43
https://doi.org/10.1016/s0927-0248(97)00179-7
https://doi.org/10.1016/s0927-0248(97)00179-7
Autor:
Makoto Ryoji, Yosinori Dake, Tamio Hara, Yoshinobu Aoyagi, Manabu Hamagaki, Katsu Ohnishi, Masakuni Tohkai
Publikováno v:
Japanese Journal of Applied Physics. 31:4357
A new etching system using electron-beam-excited plasma (EBEP) has been developed. This EBEP system is able to steadily produce a high-density plasma with a large diameter by introducing a high-current low electron beam into the etching chamber. The
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cd03e0d14a468ffc79b01a49bc41550c
https://doi.org/10.1143/jjap.31.4357
https://doi.org/10.1143/jjap.31.4357
Publikováno v:
Transactions of the Iron and Steel Institute of Japan. 28:973-977
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::78d90bcb20a3ff74085f08053d7b1bc5
https://doi.org/10.2355/isijinternational1966.28.973
https://doi.org/10.2355/isijinternational1966.28.973
Publikováno v:
Acta Metallurgica. 35:1433-1445
The influence of changes of volume fraction of Nb3 Sn, grain size and upper critical magnetic field due to two-stage annealing treatment (low temperature annealing to form fine grains + high temperature annealing to raise upper critical magnetic fiel
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8f59f37e373e9b0380460a4e354c2eaa
https://doi.org/10.1016/0001-6160(87)90089-7
https://doi.org/10.1016/0001-6160(87)90089-7
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