Zobrazeno 1 - 10
of 38
pro vyhledávání: '"Makoto Motoyoshi"'
TSV fabrication technology using direct electroplating of Cu on the electroless plated barrier metal
Autor:
Shoso Shingubara, Tomohiro Shimizu, Kosuke Matsui, Yuko Miyake, Yuichiro Torinari, Makoto Motoyoshi, Shigeru Watariguchi, Hideki Watanabe
Publikováno v:
2022 IEEE International Interconnect Technology Conference (IITC).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2505e8ac87702748fc785da5e75dc2d1
https://doi.org/10.1109/iitc52079.2022.9881324
https://doi.org/10.1109/iitc52079.2022.9881324
Autor:
Hideki Watanabe, Makoto Motoyoshi, Yuichiro Torinari, Shigeru Watariguchi, Shoso Shingubara, Kosuke Matsui, Tomohiro Shimizu
Publikováno v:
2021 IEEE International Interconnect Technology Conference (IITC).
We developed TSV fabrication process using the anisotropic wet etching of Si assisted by noble metal catalyst and electroless plating of CoWB barrier and Cu seed layers. These methods are essentially low cost as compared to conventional dry etching a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f4bedb44957cb3f6ce8333cdec564087
https://doi.org/10.1109/iitc51362.2021.9537363
https://doi.org/10.1109/iitc51362.2021.9537363
Autor:
Aya Konno-Yamamoto, Osamu Narumoto, Miho Yamaguchi, Yuta Inoue, Makoto Motoyoshi, Takeshi Fukami, Shota Yamamoto, Hirotoshi Matsui, Atsuhisa Tamura
Publikováno v:
Oxford Medical Case Reports
Epidermal growth factor receptor (EGFR) tyrosine kinase inhibitors (TKIs) are a first-line treatment for patients with nonsmall-cell lung cancer harboring EGFR mutations. We report a 65-year-old Japanese woman with nonsmall-cell lung cancer taking an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a18ba6b3689a3a82cdce1e0f1cd3c510
http://europepmc.org/articles/PMC8297640
http://europepmc.org/articles/PMC8297640
Publikováno v:
Proceedings of the 29th International Workshop on Vertex Detectors (VERTEX2020).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a22f27b36b3e446e1762a7d6f7ef2126
https://doi.org/10.7566/jpscp.34.010010
https://doi.org/10.7566/jpscp.34.010010
Publikováno v:
ECS Transactions. 92:29-38
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::86217bea5a9df53a9f29636c5e8652f3
https://doi.org/10.1149/09205.0029ecst
https://doi.org/10.1149/09205.0029ecst
Autor:
Miho Yamada, Yoichi Ikegami, Kazuhiko Hara, Masayuki Ikebe, Shun Ono, Yasuo Arai, Makoto Motoyoshi, Manabu Togawa, A. Ishikawa, Ikuo Kurachi, Toru Tsuboyama
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 924:422-425
SOFIST4 is an SOI pixel sensor designed for the International Linear Collider (ILC) vertex detector. In order to satisfy the requirements of the ILC vertex detector, the chip consists of three-stage hit-charge and hit-time memories in each 20 μ m ×
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::89e68e209526441c8c6d23b8626bbc9a
https://doi.org/10.1016/j.nima.2018.08.089
https://doi.org/10.1016/j.nima.2018.08.089
Autor:
Edoardo Charbon, Andrada Muntean, Scott Lindner, Andrei Ardelean, Myung-Jae Lee, Makoto Motoyoshi, Esteban Venialgo, Claudio Bruschini, Francesco Gramuglia
Publikováno v:
2020 IEEE Nuclear Science Symposium and Medical Imaging Conference (NSS/MIC).
We present a frontside-illuminated (FSI) multichannel digital silicon photomultiplier (MD-SiPM) fabricated in 0.18 µm/0.18 µm 3D-stacked CMOS technology. The top tier is dedicated to the FSI photodetectors, while the bottom tier comprises timestamp
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c3171c87533063e4fde9d0cbcb3acc64
https://doi.org/10.1109/nss/mic42677.2020.9507833
https://doi.org/10.1109/nss/mic42677.2020.9507833
Autor:
Makoto Motoyoshi
Publikováno v:
Hard X-Ray, Gamma-Ray, and Neutron Detector Physics XXII.
This paper presents the experimental results for a pixel detector device fabricated with 3.0-μm-diameter gold cone bump connections. The process integrity was checked for a test element group of a stacked heterogeneous X-ray sensor with gold cylindr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cd29ab93d93eb22ae0dd87095f5195c4
https://doi.org/10.1117/12.2567613
https://doi.org/10.1117/12.2567613
Autor:
Makoto Motoyoshi, Bin Zhao, Aya Takai, Shinichiro Goto, Hiroshi Nakada, Yukio Saito, Kazuyuki Ito
Publikováno v:
Nihon Gekakei Rengo Gakkaishi (Journal of Japanese College of Surgeons). 42:664-669
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::75122a0a07ede664d6e75f66c40b5cc3
https://doi.org/10.4030/jjcs.42.664
https://doi.org/10.4030/jjcs.42.664
Autor:
Miho Yamada, Shun Ono, Yasuo Arai, Ikuo Kurachi, Toru Tsuboyama, Masayuki Ikebe, Makoto Motoyoshi
Publikováno v:
3DIC
The international linear collider (ILC) experiment requires a vertex detector which is characterized by low hit occupancy, low material budget, high-speed readout and high spatial resolution better than 3 /xm. A high functional signal readout circuit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::df3523139ed2eb1dfa3e859ca02be98f
https://doi.org/10.1109/3dic48104.2019.9058850
https://doi.org/10.1109/3dic48104.2019.9058850