Zobrazeno 1 - 10
of 14
pro vyhledávání: '"Makoto Momota"'
Autor:
Takahiro Goto, Wataru Nihashi, Makoto Momota, Toru Tsuchihashi, Hideaki Tsubaki, Toru Fujimori
Publikováno v:
Journal of Photopolymer Science and Technology. 28:489-499
Autor:
Toru Fujimori, Takahiro Goto, Wataru Nihashi, Toru Tsuchihashi, Hideaki Tsubaki, Makoto Momota
Publikováno v:
SPIE Proceedings.
Manipulation of dissolution properties by changing organic solvent developer and rinse material provides a novel technology to obtain fine pattern beyond the limitation of imaging system based on alkaline developer. QCM study showed no swelling chara
Autor:
Fumiyuki Nishiyama, Tsukasa Yamanaka, Kenichiro Sato, Kunihiko Kodama, Tadayoshi Kokubo, Makoto Momota, Shinnichi Kanna, Shiro Tan, Yasumasa Kawabe, Hyou Takahashi
Publikováno v:
Journal of Photopolymer Science and Technology. 17:501-509
Autor:
Makoto Momota, Takashi Nakamura, Shuichi Tsuzuki, Toru Numaguchi, Toru Umeda, Shinichi Sugiyama, Michael Sevegney
Publikováno v:
SPIE Proceedings.
An effective filter start-up method has been required by device manufacturers, mainly in order to reduce waste volume of lithography process chemicals, which become more expensive as lithography technology advances. Remaining air was monitored during
Publikováno v:
ChemInform. 22
Publikováno v:
The Journal of Organic Chemistry. 55:5364-5368
Autor:
Yasumasa Kawabe, Makoto Momota, Shinichi Kanna, Kunihiko Kodama, Fumiyuki Nishiyama, Tadayoshi Kokubo, Kenichiro Sato, Hyou Takahashi, Shiro Tan, Tsukasa Yamanaka
Publikováno v:
SPIE Proceedings.
Transparency of the resist film at exposure wavelength affects lithographic performances, such as sensitivity, profile and resolution. Not only binder polymer, but also photo acid generator (PAG) itself has a significant impact on transparency of the
Publikováno v:
SPIE Proceedings.
A study for a new organic bottom antireflective coating (BARC) composition is described. A structural design of a light-absorbing dye was most important because dye structure not only plays a role in eliminating reflection from a substrate but also s
ChemInform Abstract: Generation and Chemical Fate of 2,2,2-Trifluoro-1-phenylsulfonylethyl Carbanion
Autor:
Makoto Momota, Kenji Uneyama
Publikováno v:
ChemInform. 21
2,2,2-Trifluoro-1-phenylsulfonylethyl carbanion generated by the action of LDA in THF–HMPA can be methylated and iodinated, where the tetraethylammonium cation plays an essential role for the stabilization of the carbanion.
Autor:
Kenji Uneyama, Makoto Momota
Publikováno v:
ChemInform. 20
Lewis acid-catalyzed dechlorination of 1-chloro-2,2,2-trifluoroethyl phenyl sulfide generates 2,2,2-trifluoro-1-phenylsulfenylethyl carbocation which undergoes electrophilic reaction with aromatic compounds.