Výsledky vyhledávání - "Makoto Katou"

Activation Treatment of Ion Implanted Dopants Using Hybrid Super RTA Equipment

Autor: Mitsuo Okamoto, Teruyuki Yashima, Tomoyoshi Endou, Junji Senzaki, Fukuyoshi Morigasa, Shinsuke Harada, Shin Ichi Nishizawa, Takuo Isii, Makoto Katou, Akimasa Kinoshita, Kenji Fukuda

Publikováno v: Materials Science Forum. :803-806

We perform rapid thermal annealing (RTA) on areas as large as 2-inch φ (diameter) at high temperature using the hybrid super RTA (HS-RTA) equipment. The HS-RTA equipment consists of an infrared annealing unit and a RF induction annealing unit in ord

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::0cfbe0ce4b2e6d101778ab82b4af721f
https://doi.org/10.4028/www.scientific.net/msf.527-529.803

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Effect of Surface Orientation and Off-Angle on Surface Roughness and Electrical Properties of p-Type Impurity Implanted 4H-SiC Substrate after High Temperature Annealing

Autor: Kazuo Arai, Takuo Isii, Kenji Fukuda, Kazutoshi Kojima, Makoto Katou, Akimasa Kinoshita, Tomoyoshi Endou, Fukuyoshi Morigasa, Miwa Kawasaki, Teruyuki Yashima

Publikováno v: Materials Science Forum. :835-838

We investigate the effect of surface orientation and off-angle for Al-implanted 4H-SiC samples after high temperature annealing. The samples are obtained from a 4H-SiC (0001) substrate 8° off-angled (Si-face 8°off), and (000-1) substrates 8° (C-fa

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::05f6fc7b8ca640e72e147461e29a2143
https://doi.org/10.4028/www.scientific.net/msf.527-529.835

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A CASE OF DUCTAL CARCINOMA IN SITU PRESENTING AN APPEARANCE OF INFLAMMATORY BREAST CANCER

Autor: Shinsuke Watanabe, Makoto Katou, Yoshimasa Ebihara, Soujin Sai, Mamoru Masuyama, Hiromichi Ishii

Publikováno v: Nihon Rinsho Geka Gakkai Zasshi (Journal of Japan Surgical Association). 64:2410-2413

症例は36歳,女性.乳房の発赤,腫瘤触知を主訴に受診し臨床像と各種画像所見から炎症性乳癌の診断にて入院となった.術前化学療法を行い炎症所見の消失後に乳房切除術を施行したところ,

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::527b76a8187fe4dbeb36fd377f3e4138
https://doi.org/10.3919/jjsa.64.2410

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Activation of p-Type Dopants in 4H–SiC Using Hybrid Super-Rapid Thermal Annealing Equipment

Autor: Mitsuo Okamato, Kenji Fukuda, Teruyuki Yashima, Kenji Suzuki, Shinsuke Harada, Junji Senzaki, Makoto Katou, Akimasa Kinoshita, Fukuyoshi Morigasa, Shin Ichi Nishizawa, Takuo Isii, Tomoyoshi Endou

Publikováno v: Japanese Journal of Applied Physics. 46:5342-5344

Rapid thermal annealing (RTA) on areas with diameters as large as 2 in. at high temperatures using hybrid super-RTA (HS-RTA) equipment is performed in this study. The HS-RTA equipment consists of an infrared annealing unit and an RF induction anneali

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::71ef77b51bcba7547074622f9d99d95b
https://doi.org/10.1143/jjap.46.5342

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Annular Axial Flow-Induced Vibration of Cylindrical Shells by Flu¨gge’s Shell Theory

Autor: Makoto Katou, Katsuhisa Fujita

Publikováno v: Volume 9: 6th FSI, AE and FIV and N Symposium.

The unstable phenomena of thin cylindrical shells subjected to annular axial flow are investigated. In this paper, the analytical model is composed of an elastic axisymmetric shell and a rigid one which are arranged co-axially. Considering the fluid

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::e7bdd1d3b8dce6d1aa0549da9ba7eda1
https://doi.org/10.1115/pvp2006-icpvt-11-93676

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