Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Makio Horikawa"'
Publikováno v:
Scopus-Elsevier
This paper reports the experimental results of examining the residual stress and stress gradient of LPCVD multilayered polysilicon film according to various rapid thermal annealing (RTA) in a nitrogen atmosphere. In particular the stress gradient of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::28e27489dc5d2678314d3d11775d7e75
https://doi.org/10.1109/memsys.2002.984300
https://doi.org/10.1109/memsys.2002.984300
Autor:
Hiroshi Otani, Makio Horikawa, Shuichi Tani, Masahiro Tsugai, Shigeru Hamada, Daisuke Katagiri
Publikováno v:
Scopus-Elsevier
In order to clarify the stress concentration and surface roughness effect on strength of the polycrystalline silicon (poly-Si) structure, bending tests of poly-Si microcantilever beam specimen and surface roughness measurement is performed. The bendi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::920c08408503a03c3293e665a914eb66
http://www.scopus.com/inward/record.url?eid=2-s2.0-32944471743&partnerID=MN8TOARS
http://www.scopus.com/inward/record.url?eid=2-s2.0-32944471743&partnerID=MN8TOARS
