Zobrazeno 1 - 10
of 16
pro vyhledávání: '"Makinoshima Takashi"'
Autor:
Makinoshima Takashi, Sachiko Shinjo, Toida Takumi, Masatoshi Echigo, Yuta Togashi, Takashi Sato
Publikováno v:
International Conference on Extreme Ultraviolet Lithography 2018.
We are developing the EUV sensitizer for resists and Spin-on-Carbon materials. In previous report, we reported that we had developed the novel materials containing the iodine having high EUV absorption ability, and EUV absorption rate proved to be ca
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cba544acb60b6518f301a8edb1d5c9d0
https://doi.org/10.1117/12.2323096
https://doi.org/10.1117/12.2323096
Autor:
Masayoshi Ueno, Takashi Sato, Masatoshi Echigo, Yasushi Miki, Makinoshima Takashi, Koichi Yamada, Horiuchi Junya
Publikováno v:
Advances in Patterning Materials and Processes XXXV.
We had developed various Polyphenols and Xanthene derivatives such as NF7177C and NF0197 which showed high heat resistance. In this paper, we reported on new mareimide derivatives named “NeoFARIT N0XX (NFN0XX)” series which showed the highest hea
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0e0a8ef29d2bbcdbff60b7e25018d3ba
https://doi.org/10.1117/12.2297289
https://doi.org/10.1117/12.2297289
Autor:
Masatoshi Echigo, Takashi Sato, Yoko Shimizu, Okada Kana, Horiuchi Junya, Makinoshima Takashi, Takigawa Tomoaki, Naoya Uchiyama
Publikováno v:
SPIE Proceedings.
In this paper, we report on new polyphenols synthesized by the condensation compounds of phenols and aldehydes. The phenols were 4,4'-biphenol, 2,6-dihydroxynaphthalene and 2,7-dihydroxynaphthalene. The aldehydes were 4- phenylbenzaldehyde and 4,4'-b
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7201faa0fbb33d559b3ef30e343ab243
https://doi.org/10.1117/12.2257975
https://doi.org/10.1117/12.2257975
Autor:
Horiuchi Junya, Okada Kana, Yoko Shimizu, Takashi Satou, Masatoshi Echigo, Makinoshima Takashi
Publikováno v:
SPIE Proceedings.
In this paper, we report the development of a new polyphenol, NF7177, applied to the Spin-On Carbon Hardmask and the thermosetting properties. The new polyphenol derivatives were easily synthesized by the condensation of aldehydes and dihydroxybiphen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ac20442d674fe7b0d2e3ef39746d5f6d
https://doi.org/10.1117/12.2218946
https://doi.org/10.1117/12.2218946
Autor:
Gronheid, Roel, Sanders, Daniel P., Yamamoto, Hiroaki, Horiuchi, Junya, Omatsu, Tadashi, Makinoshima, Takashi, Nagao, Shinichi, Echigo, Masatoshi
Publikováno v:
Proceedings of SPIE; May 2020, Vol. 11326 Issue: 1 p113261M-113261M-8, 1019358p
Autor:
Takashi Sato, Masatoshi Echigo, Yumi Ochiai, Masako Yamakawa, Makinoshima Takashi, Yu Okada, Masaaki Takasuka
Publikováno v:
SPIE Proceedings.
In this paper, we report the development of new xanthendiol derivatives applied to the negative-tone molecular resists for EB/EUVL. The new xanthendiol derivatives were easily synthesized by the condensation of aldehydes and dihydroxyaromatic compoun
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b47762c7364bc6c49f96971c19d7223a
https://doi.org/10.1117/12.2045654
https://doi.org/10.1117/12.2045654
Autor:
Ronse, Kurt G., Hendrickx, Eric, Naulleau, Patrick P., Gargini, Paolo A., Itani, Toshiro, Sato, Takashi, Togashi, Yuta, Shinjo, Sachiko, Toida, Takumi, Makinoshima, Takashi, Echigo, Masatoshi
Publikováno v:
Proceedings of SPIE; October 2018, Vol. 10809 Issue: 1 p108091X-108091X-16, 10701026p
Autor:
Hohle, Christoph K., Gronheid, Roel, Horiuchi, Junya, Takigawa, Tomoaki, Shimizu, Yoko, Makinoshima, Takashi, Sato, Takashi, Echigo, Masatoshi
Publikováno v:
Proceedings of SPIE; March 2018, Vol. 10586 Issue: 1 p105861K-105861K-11, 10480251p
Autor:
Hohle, Christoph K., Younkin, Todd R., Makinoshima, Takashi, Satou, Takashi, Horiuchi, Junya, Okada, Kana, Shimizu, Yoko, Echigo, Masatoshi
Publikováno v:
Proceedings of SPIE; March 2016, Vol. 9779 Issue: 1 p97791K-97791K-9, 880129p
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