Squeeze Film Effect in Surface Micromachined Nano Ultrasonic Sensor for Different Diaphragm Displacement Profiles.

Autor: Dastidar AG; Regent Education and Research Foundation Group of Institutions, Kolkata 700121, India.; Department of Physics, Mizoram University (A Central University), Aizawl 796004, India., Maity R; Department of Electronics and Communication Engineering, Mizoram University (A Central University), Aizawl 796004, India., Tiwari RC; Department of Physics, Mizoram University (A Central University), Aizawl 796004, India., Vidojevic D; Department of Information Technology, University of Criminal Investigation and Police Studies, 11060 Belgrade, Serbia., Kevkic TS; Department of Physics, Faculty of Sciences and Mathematics, University of Pristina in Kosovska Mitrovica, 38220 Kosovska Mitrovica, Serbia., Nikolic V; Department of Information Technology, University of Criminal Investigation and Police Studies, 11060 Belgrade, Serbia., Das S; Functional Materials and Devices Division, CSIR-Central Glass and Ceramic Research Institute, Kolkata 700032, India., Maity NP; Department of Electronics and Communication Engineering, Mizoram University (A Central University), Aizawl 796004, India.

Publikováno v: Sensors (Basel, Switzerland) [Sensors (Basel)] 2023 May 11; Vol. 23 (10). Date of Electronic Publication: 2023 May 11.