Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Mahui Xu"'
Publikováno v:
Measurement. 194:110851
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6dd5e4bfcce20fd96bc5c3273feb35ba
https://doi.org/10.1016/j.measurement.2022.110851
https://doi.org/10.1016/j.measurement.2022.110851
Publikováno v:
Journal of Vacuum Science & Technology B. 39:064203
The shape, size, and working state of the pressure-sensing elements are important factors to determine the pressure sensor performances. A touch mode micro-electro-mechanical-system (MEMS) capacitance diaphragm gauge with a circular silicon pressure-
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e93c1c437647b60ebd20ab7399e086d0
https://doi.org/10.1116/6.0001332
https://doi.org/10.1116/6.0001332
Publikováno v:
Proceeding of the 11th World Congress on Intelligent Control and Automation.
The closed X-type micro-electromechanical systems (MEMS) cantilever was designed and the mechanical analysis model was established, the coefficient of elasticity of the cantilever was derived by using the card's second of energy method law and Hooke'
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5b93787678121d50303ab2b38cc6436a
https://doi.org/10.1109/wcica.2014.7053270
https://doi.org/10.1109/wcica.2014.7053270
Publikováno v:
Proceeding of the 11th World Congress on Intelligent Control & Automation; 2014, p3351-3354, 4p