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Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 461:25-29
Astigmatism is a type of aberration in beam optics which causes asymmetry in transverse coordinates. This asymmetric beam often shows an elliptical profile instead of circular, which may cause differences between the major and minor ellipse axes diam
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::841001d6b32a7cda6b25b07dc1112f21
https://doi.org/10.1016/j.nimb.2019.09.011
https://doi.org/10.1016/j.nimb.2019.09.011
