Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Mahalingam, Anbu Selvam"'
Autor:
John Schaller, Lee Jong Hyup, Mary Claire Silvestre, K M Mahalingam Anbu Selvam, Zhang Galor Wenyi, Eswar Ramanathan, Patrick Justison, Christopher Ordonio, Cristiano Capasso
Publikováno v:
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Ultra Low-K films are used in advanced technologies as an interlayer dielectric in Cu processing. Due to its high porosity, it poses a lot of process challenges. This paper discusses one challenge it posed for reliability of vertical natural capacito
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7006ae1ac981c24150f0b9dfa6c42af0
https://doi.org/10.1109/asmc.2015.7164431
https://doi.org/10.1109/asmc.2015.7164431
Autor:
Rajagopalan, Balajee, Laloe, Jean-Baptiste, Silvestre, Mary Claire, Ramanathan, Eswar, Khanal, Sohana, Laval, Alain, Ge, Qian, Takahashi, Nobuyuki, Mahalingam, Anbu Selvam, Liew, San Leong, Teagle, Robert
Publikováno v:
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC); 2016, p354-357, 4p
Autor:
Shah, Ketan, Periasamy, Prakash, Chandrasekhar, Ashwini, Mahalingam, Anbu Selvam K M, Pal, Shyam, Ordonio, Christopher, Welti, Peter, Low, Chun Hui, Child, Craig
Publikováno v:
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC); 2016, p316-319, 4p
Autor:
Silvestre, Mary Claire, Gogna, Mukesh, Mahalingam, Anbu Selvam K M, Ramanathan, Eswar, Ordonio, Christopher, Schaller, John
Publikováno v:
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC); 2016, p446-450, 5p
Autor:
Ramanathan, Eswar, Silvestre, Mary Claire, Mahalingam, Anbu Selvam KM, Garg, Niti, Siddhartha, Ordonio, Christopher, Schaller, John
Publikováno v:
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC); 2015, p68-71, 4p
Autor:
Islam, A K M Sajjadul, Periasamy, Prakash, Chandrasekhar, Ashwini, Mahalingam, Anbu Selvam K M, Witt, Christian, Child, Craig
Publikováno v:
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC); 2016, p364-366, 3p
Autor:
Ming He, Ordonio, Christopher, Chun Hui Low, Welti, Peter, Lobb, Granger, Clancy, Aleksandra, Shu, Jeff, Hamouda, Ayman, Stephens, Jason, Shah, Ketan, Chandrasekhar, Ashwini, Silvestre, Mary Claire, Periasamy, Prakash, Mahalingam, Anbu Selvam KM, Pal, Shyam, Child, Craig
Publikováno v:
2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC); 2016, p15-17, 3p
Autor:
Mahalingam, Anbu Selvam KM, Silvestre, Mary Claire, Ramanathan, Eswar, Ordonio, Christopher, Schaller, John
Publikováno v:
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC); 2015, p408-410, 3p
Autor:
da Silva, Adam, Periasamy, Prakash, Sarad, Jeric, Mahalingam, Anbu Selvam, Liew, San Leong, Child, Craig
Publikováno v:
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC); 2016, p147-148, 2p