Helium Ion Microscopy

Autor: Maas, Diederik J., van Gastel, Raoul, Bracco, Gianangelo, Holst, Bodil

Publikováno v: Surface Sciences Techniques, 461-497
STARTPAGE=461;ENDPAGE=497;TITLE=Surface Sciences Techniques
Surface Science Techniques ISBN: 9783642342424

The realization of a practical helium gas field ionization source (GFIS) enabled helium ion microscopy (HIM) as a new technique to image and modify materials and microstructures. After a brief overview of most common ultra-microscopy techniques (TEM,

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::dcb9cbca6a958f8ee43b32e723d013fa
https://research.utwente.nl/en/publications/0475be4b-b061-45ca-922f-7681cea3957c

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Helium Ion Lithography.

Autor: van der Drift, Emile, Maas, Diederik J.

Publikováno v: Nanofabrication; 2012, p93-116, 24p

Nano-engineering with a focused helium ion beam.

Autor: Maas, Diederik J., van der Drift, Emile W., van Veldhoven, Emile, Meessen, Jeroen, Rudneva, Maria, Alkemade, Paul F. A.

Publikováno v: MRS Online Proceedings Library; 2011, Vol. 1354 Issue 1, p1-14, 14p

Electrostatic aberration correction in low-voltage SEM.

Autor: Maas, Diederik J., Henstra, Sander, Krijn, Marcel, Mentink, Sjoerd

Publikováno v: Proceedings of SPIE; Nov2001, Issue 1, p205-217, 13p