Advanced defect classification by smart sampling, based on sub-wavelength anisotropic scatterometry.

Autor: van der Walle, Peter, Kramer, Esther, Ebeling, Rob, Spruit, Helma, Alkemade, Paul, Pereira, Silvania F., van der Donck, Jacques, Maas, Diederik

Publikováno v: Proceedings of SPIE; 2018, Vol. 10585, p1-6, 6p

Helium Ion Microscopy

Autor: Maas, Diederik J., van Gastel, Raoul, Bracco, Gianangelo, Holst, Bodil

Publikováno v: Surface Sciences Techniques, 461-497
STARTPAGE=461;ENDPAGE=497;TITLE=Surface Sciences Techniques
Surface Science Techniques ISBN: 9783642342424

The realization of a practical helium gas field ionization source (GFIS) enabled helium ion microscopy (HIM) as a new technique to image and modify materials and microstructures. After a brief overview of most common ultra-microscopy techniques (TEM,

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::dcb9cbca6a958f8ee43b32e723d013fa
https://research.utwente.nl/en/publications/0475be4b-b061-45ca-922f-7681cea3957c

Advanced defect classification by smart sampling, based on sub-wavelength anisotropic scatterometry

Autor: Ukraintsev, Vladimir A., Adan, Ofer, van der Walle, Peter, Kramer, Esther, Ebeling, Rob, Spruit, Helma, Alkemade, Paul, Pereira, Silvania, van der Donck, Jacques, Maas, Diederik

Publikováno v: Proceedings of SPIE; March 2018, Vol. 10585 Issue: 1 p105852D-105852D-6, 952675p

Lab- and field-test results of MFIG, the first real-time vacuum-contamination sensor

Autor: Sanchez, Martha I., Ukraintsev, Vladimir A., Maas, Diederik, Muilwijk, Pim, van Putten, Michel, de Graaf, Frank, Kievit, Olaf, Boerboom, Patrique, Koster, Norbert B.

Publikováno v: Proceedings of SPIE; March 2017, Vol. 10145 Issue: 1 p101452I-101452I-7, 913076p

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