Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Maarten van Gestel"'
Autor:
Maarten van Gestel, Henk Draaisma
Publikováno v:
NIP & Digital Fabrication Conference. 17:801-803
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1e7c997ff68463463f586ec680b105b8
https://doi.org/10.2352/issn.2169-4451.2001.17.1.art00082_2
https://doi.org/10.2352/issn.2169-4451.2001.17.1.art00082_2
Autor:
Alain E. Kaloyeros, Sumant Padiyar, Steve Martin, Zailong Bian, Heidi Gundlach, Andreas Knorr, Maarten van Gestel, Robert Talevi, Robert E. Geer, E.O. Shaffer
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 18:252
The integration of low-temperature plasma-promoted chemical-vapor deposition (PPCVD) of aluminum, using dimethylethylamine-alane (DMEAA) as the source precursor, with benzocyclobutene (BCB) low-k polymers has been investigated to explore the feasibil
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::571b862962a3a3a1926870cfc6e8e098
https://doi.org/10.1116/1.591180
https://doi.org/10.1116/1.591180