Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Maarten van Es"'
Autor:
Maarten van Es, Selman Tamer, Elin Bloem, Laurent Fillinger, Elfi van Zeijl, Klára Maturová, Jacques van der Donck, Rob Willekers, Adam Chuang, Diederik Maas
Publikováno v:
Micro and Nano Engineering, Vol 19, Iss , Pp 100181- (2023)
Patterning photoresist with extreme control over dose and placement is the first crucial step in semiconductor manufacturing. However, how can the activation of modern complex resist components be accurately measured at sufficient spatial resolution?
Externí odkaz:
https://doaj.org/article/0653850e95f944f287663f12ba7a92af
Autor:
Maarten van Es, Mehmet Tamer, Robbert Bloem, Laurent Fillinger, Elfi van Zeijl, Klára Maturová, Jacques van der Donck, Rob Willekers, Diederik Maas
Patterning photoresist with extreme control over dose and placement is the first crucial step in semiconductor manufacturing. However, how can the activation of modern complex resist components be accurately measured at sufficient spatial resolution?
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c3a700cab3f497d3ad392c57bf97ae51
https://doi.org/10.21203/rs.3.rs-1238936/v2
https://doi.org/10.21203/rs.3.rs-1238936/v2
Publikováno v:
ECS Meeting Abstracts. :839-839
The combination of area-selective ALD intermitted with back-etching steps has recently attracted much interest because of its potential in achieving high selectivity. Compared to non-interrupted area-selective ALD this supercycle approach has proven
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::60284f5dc191d73a980f6d80cca17135
https://doi.org/10.1149/ma2021-0121839mtgabs
https://doi.org/10.1149/ma2021-0121839mtgabs
Autor:
Dionne C. G. Klein, Cordula M. Stroh, Henriette Jensenius, Maarten van Es, A. S. M. Kamruzzahan, Amalia Stamouli, Hermann J. Gruber, Tjerk H. Oosterkamp, Peter Hinterdorfer
Publikováno v:
ChemPhysChem; 12/15/2003, Vol. 4 Issue 12, p1367-1371, 5p
Autor:
Navarro, Violeta, Mohtashami, Abbas, Herfst, Rodolf, Maturova, Klara, van Es, Maarten, Piras, Daniele, Sadeghian, Hamed
Publikováno v:
Proceedings of SPIE; 1/12/2018, Vol. 10584, p1-6, 6p
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Nov/Dec2015, Vol. 33 Issue 6, p06F503-1-06F503-5, 5p
Autor:
Battisti, I., Makles, K. M., Mucientes, M. S. J., Guo, Y., Simons, E., Bogdanowicz, J., Moussa, A., Blanco, V., Yasin, F., Crotti, D., Charley, A.-L., Leray, P., van Reijzen, M. E., Bozdog, C., Sadeghian, H.
Publikováno v:
Proceedings of SPIE; 1/20/2022, Vol. 12053, p1205310-1205310, 1p