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pro vyhledávání: '"Maarten Voncken"'
Autor:
Arjan Holscher, Jeong-Heung Kong, Samah Khalek, Chansam Chang, Elliot Oti, Jong Hoon Jang, Hyunwoo Hwang, Roelof de Graaf, Young Ha Kim, Jeroen Cottaar, Young Seog Kang, Stefan Weichselbaum, Marcel Raas, Richard Droste, Ralf Gommers, YoungSun Nam, ByeongSoo Lee, Bram van Hoof, Jan van Kemenade, Maarten Voncken
Publikováno v:
SPIE Proceedings.
ASML’s 300mm scanner-systems are built on the TWINSCAN (XT/NXT) platform and yield high productivity levels for dry as well as immersion litho-scanners. NXT:1980Di immersion scanners yield productivity levels as high as 275wph while maintaining the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bd4101e7bdff4656fcb0929b34448e7c
https://doi.org/10.1117/12.2259794
https://doi.org/10.1117/12.2259794
