NUCLEATION AND GROWTH IN TiN CVD ON GRAPHITE SUBSTRATES

Autor: MH Haafkens, LR Lodewijk Wolff, HB de Bree, MM Michorius

Publikováno v: Journal de Physique IV Proceedings
Journal de Physique IV Proceedings, EDP Sciences, 1991, 02 (C2), pp.C2-217-C2-224. ⟨10.1051/jp4:1991227⟩
Journal de Physique IV, Colloque, 1(C2), 217-224. EDP Sciences

Morphology and preferential crystallographic orientation were studied in TiN CVD on graphite substrates. Three types of isostatically pressed graphite were used, both in as delivered and in purified condition. Using X-ray diffractometry and optical a

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https://hal.archives-ouvertes.fr/jpa-00249814