The advent of MEMS in space

Autor: Lafontan, X., Pressecq, F., Beaudoin, F., Rigo, S., Dardalhon, M., Roux, J.-L., Schmitt, P., Kuchenbecker, J., Baradat, B., Lellouchi, D., Le-Touze, C., Nicot, J.-M.

Publikováno v: In Microelectronics Reliability 2003 43(7):1061-1083

Digital electronics for inertial MEMS and space applications

Autor: Raphaël Lévy, Leopold Delahaye, Jean Guerard

Publikováno v: Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP 2018)
Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP 2018), May 2018, ROME, Italy. ⟨10.1109/DTIP.2018.8394236⟩

International audience; This paper presents an electronic platform for driving resonant MEMS in inertial sensors, and possibly other resonant or carrier based sensors. The architecture is fully integrated in a digital programmable device (FPGA), and

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::effd5296562e91c086da1db8ef6710ad
https://hal.archives-ouvertes.fr/hal-01993959

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Optical MEMS for space

Autor: Frederic Zamkotsian

Publikováno v: Optical MEMS, Nanophotonics, and Their Applications

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::c86d97024f79092435b999cd913c21e6
https://doi.org/10.1201/9781315151557-4

Wireless MEMS for space applications

Autor: A.G. Darrin, Robert Osiander

For most wireless devices, the increase of capability with concurrent reduction in size has also required for mechanical components a reduction in size, a feat accomplished in part by micro-electromechanical systems (MEMS) technology. The same is tru

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::20649605d2b21205791743465a9f0d5f
https://doi.org/10.1016/b978-0-08-100449-4.00009-9