Zobrazeno 1 - 8
of 8
pro vyhledávání: '"MA Wank"'
Autor:
Miro Zeman, B. Vet, R.A.C.M.M. van Swaaij, Arno H. M. Smets, Marinus Fischer, David C. Bobela, MA Wank, R. M. C. M. van de Sanden, C.R. Wronski
Publikováno v:
IEEE Journal of Photovoltaics, 2(2), 94-98. IEEE Electron Devices Society
The bandgap of hydrogenated amorphous silicon (a-Si:H) is studied using a unique set of a-Si:H films deposited by means of three different processing techniques. Using this large collection of a-Si:H films with a wide variety of nanostructures, it is
Publikováno v:
Progress in Photovoltaics: Research and Applications. 20:333-342
We applied pulse-shaped biasing (PSB) to the expanding thermal plasma deposition of intrinsic hydrogenated amorphous silicon layers at substrate temperatures of 200 degrees C and growth rates of about 1?nm/s. Fourier transform infrared spectroscopy o
Autor:
Miro Zeman, MA Wank, B. Vet, M.C.M. van de Sanden, David C. Bobela, R.A.C.M.M. van Swaaij, C.R. Wronski, A. H. M. Smets, Marinus Fischer
Publikováno v:
2011 37th IEEE Photovoltaic Specialists Conference.
The network and nature of hydrogenated amorphous silicon (a-Si:H) are conventionally interpreted in terms of a continuous random network (CRN) of Si-Si bonds, weak Si-Si, Si-H bond and dangling bonds. A CRN requires that the smallest anisotropic feat
Publikováno v:
Journal of Applied Physics, 108(10):103304, 103304-1/9. American Institute of Physics
Journal of Applied Physics, 108 (10), 2010
Journal of Applied Physics, 108 (10), 2010
We have applied pulse-shaped biasing to the expanding thermal plasma deposition of hydrogenated amorphous silicon at substrate temperatures ? 200?°C and growth rates around 1 nm/s. Substrate voltage measurements and measurements with a retarding fie
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2ee109453a373c340f7304f887419f1e
https://research.tue.nl/nl/publications/68c47671-5245-4985-b249-8ef0de18ad94
https://research.tue.nl/nl/publications/68c47671-5245-4985-b249-8ef0de18ad94
Autor:
van Racmm René Swaaij, Miro Zeman, Frans D. Tichelaar, MA Wank, van de Mcm Richard Sanden, Andrea Illiberi
Publikováno v:
Physica Status Solidi C: Conferences, 7(3-4), 571-574. Wiley-VCH Verlag
Hydrogenated amorphous silicon (a-Si:H) films are grown at different hydrogen dilutions. For high dilutions we observe a discrepancy in the surface roughness analysis between real-time spectroscopic ellipsometry (RTSE) and atomic force microscopy (AF
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::700190dc459846a191cb21e79ff8ae13
https://research.tue.nl/nl/publications/89830cb0-1f38-4310-a0d7-200ca1911e7b
https://research.tue.nl/nl/publications/89830cb0-1f38-4310-a0d7-200ca1911e7b
Publikováno v:
Amorphous and Polycrystalline Thin-Film Silicon Science and Technology-2007, 523-528
STARTPAGE=523;ENDPAGE=528;TITLE=Amorphous and Polycrystalline Thin-Film Silicon Science and Technology-2007
STARTPAGE=523;ENDPAGE=528;TITLE=Amorphous and Polycrystalline Thin-Film Silicon Science and Technology-2007
The effect of ion bombardment on the relationship between the critical hydrogen concentration ccrit and the reactor pressure has been investigated for hydrogenated amorphous silicon (a-Si:H) deposited with the expanding thermal plasma-CVD (ETP-CVD) m
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0acced32db71a1e93467a8a348bf2dc3
https://doi.org/10.1557/proc-0989-a22-04
https://doi.org/10.1557/proc-0989-a22-04
Autor:
Wmm Erwin Kessels, van Racmm René Swaaij, MA Wank, van de Mcm Richard Sanden, M. A. Blauw, Ina T. Martin
Publikováno v:
Plasma Sources Science and Technology, 19(1), 015012-1/10. Institute of Physics
We have applied both sinusoidal and pulse-shaped rf substrate biasing techniques to the expanding thermal plasma deposition of hydrogenated amorphous silicon. Spectroscopic ellipsometry and Fourier transform infrared spectroscopy data demonstrate tha
On the surface roughness development of hydrogenated amorphous silicon deposited at low growth rates
Publikováno v:
Applied Physics Letters, 95(2):021503, 021503-1/3. American Institute of Physics
Applied Physics Letters, 95 (2), 2009
Applied Physics Letters, 95 (2), 2009
The surface roughness evolution of hydrogenated amorphous silicon (a -Si:H) films has been studied using in situ spectroscopic ellipsometry for a temperature range of 150-400 °C. The effect of external rf substrate biasing on the coalescence phase i