Zobrazeno 1 - 10 of 25 pro vyhledávání: '"M.W. Messana"'
1
Fatigue Experiments on Single Crystal Silicon in an Oxygen-Free Environment
Autor: Vu A. Hong, Eldwin J. Ng, Andrew B. Graham, James Christian Salvia, Thomas W. Kenny, M.W. Messana, Todd T. Branchflower, S. Yoneoka
Publikováno v: Journal of Microelectromechanical Systems. 24:351-359
The fatigue lifetime of single crystal silicon (SCS) was characterized in an environment free of oxygen, humidity, and organics. Long-term ( $> 10^{10}$ Hz) fatigue experiments performed with smooth-walled SCS devices showed no signs of fatigue damag
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::105edeba0ba31f951b4223776e135351
https://doi.org/10.1109/jmems.2014.2331231
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2
A Method for Wafer-Scale Encapsulation of Large Lateral Deflection MEMS Devices
Autor: Thomas W. Kenny, M.W. Messana, Bongsang Kim, Andrew B. Graham, Roger T. Howe, Peter G. Hartwell, S. Yoneoka, J. Provine, Renata Melamud
Publikováno v: Journal of Microelectromechanical Systems. 19:28-37
Packaging of microelectromechanical systems (MEMS) is a critical step in the transition from development to commercialized product. This paper presents a thin-film encapsulation process that allows varying trench widths suitable for MEMS devices with
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::737634064d31afa0f69f82d80cd8cb30
https://doi.org/10.1109/jmems.2009.2035717
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4
The long path from MEMS resonators to timing products
Autor: Kuan-Lin Chen, David B. Heinz, M.W. Messana, Eldwin J. Ng, Manu Agarwal, Markus Lutz, Yushi Yang, Camille L. M. Everhart, Ian B. Flader, Thomas W. Kenny, V. Qu, Andrew B. Graham, Gary Yama, Matthew A. Hopcroft, Yunhan Chen, Rob N. Candler, Vu A. Hong, Aaron Partridge, B. Kim, Renata Melamud, Shasha Wang, Gaurav Bahl, Hyung Kyu Lee, James Christian Salvia, Gary O'brien, Chia-Fang Chiang, S. Yoneoka, Chae Hyuck Ahn
Publikováno v: 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).
Research on MEMS Resonators began over 50 years ago. In just the last 10 years, there has been a series of important technological developments, and (finally!) success at commercialization. The presentation will highlight some key milestones along th
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::4ecaada99982c1a406ed0fb086d3a68c
https://doi.org/10.1109/memsys.2015.7050869
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6
Encapsulated mechanically coupled fully-differential breathe-mode ring filters with ultra-narrow bandwidth
Autor: M.W. Messana, James Christian Salvia, Andrew B. Graham, Thomas W. Kenny, Shasha Wang, Saurabh A. Chandorkar
Publikováno v: 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.
We present hermetically encapsulated, mechanically coupled, 20 MHz breathe-mode ring filters with ultra narrow bandwidths of 5.9 kHz and 8.9 kHz, which correspond to 0.029% and 0.044% bandwidth with less than 2.7 dB insertion loss. This is the narrow
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::655c36cf1462233058184e804c1722ce
https://doi.org/10.1109/transducers.2011.5969668
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7
Capacitive absolute pressure sensor with independent electrode and membrane sizes for improved fractional capacitance change
Autor: Gary O'brien, Thomas W. Kenny, M.W. Messana, Daniela T. Buchman, J. Provine, Chia-Fang Chiang, Andrew B. Graham
Publikováno v: 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.
Unlike a traditional capacitive pressure sensor, which uses the entire deflectable diaphragm as the electrode, this paper proposes the use of reduced electrode area to increase the fractional capacitance change and reduce the device's sensitivity to
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::5eca3c822eec7bf2b0b176cc0bef3f2e
https://doi.org/10.1109/transducers.2011.5969187
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8
Temperature dependence of vacuum encapsulated resonators for humidity measurement
Autor: Andrew B. Graham, Max M. Shulaker, M.W. Messana, R.G. Hennessy
Publikováno v: 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.
This paper demonstrates the effect of temperature on humidity measurements using a charge-biased microshell encapsulated single-anchored double-ended tuning fork resonator (DETF). The resonator is electrically connected to a metal bond pad on the ext
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::d139f309fee68dadeb4e5bbaf1bf409b
https://doi.org/10.1109/transducers.2011.5969284
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