Zobrazeno 1 - 10
of 36
pro vyhledávání: '"M.R. Nabavi"'
Publikováno v:
IEEE Sensors Journal. 17:2617-2624
This paper presents a comprehensive study of demodulation techniques for high-frequency self-oscillating eddy-current displacement sensor (ECDS) interfaces. Increasing the excitation frequency is essential for lowering the skin depth in many demandin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::212c169d1f99d0e40db4891b7261becb
https://doi.org/10.1109/jsen.2017.2677526
https://doi.org/10.1109/jsen.2017.2677526
Publikováno v:
ISSCC
Displacement sensing with sub-nanometer resolution is required in advanced metrology and high-tech industry, e.g., to measure the lens position in wafer scanners. Linear encoders and interferometers are often used for this purpose, but they are bulky
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7e98ec65c5220ced2a6cb2078cf6bee1
https://doi.org/10.1109/isscc.2017.7870317
https://doi.org/10.1109/isscc.2017.7870317
Publikováno v:
IEEE Transactions on Circuits and Systems II: Express Briefs. 61:413-417
In this brief, a high-order temperature-compensated 0.6-V low-dropout voltage source (LDVS) is realized in standard 0.13- $\mu\hbox{m}$ CMOS technology. The LDVS operates at supply voltages down to 0.75 V and consumes only 39 $\mu\hbox{A}$ while prov
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e7da7b5d278a033ff490f407dafe04ca
https://doi.org/10.1109/tcsii.2014.2319952
https://doi.org/10.1109/tcsii.2014.2319952
Publikováno v:
IEEE Journal of Solid-State Circuits. 48:2868-2881
This paper presents an integrated interface for eddy-current sensors (ECSs) for displacement measurement. The employed architecture helps bridging the performance gap between the requirements of demanding and precision industrial applications and the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::536e2073ef149115bb6ced488a8a9116
https://doi.org/10.1109/jssc.2013.2281692
https://doi.org/10.1109/jssc.2013.2281692
Autor:
Stoyan Nihtianov, M.R. Nabavi
Publikováno v:
IEEE Sensors Journal. 12:3346-3355
This paper presents a comprehensive study of the design aspects of eddy-current displacement sensor (ECS) systems. In accordance with the sensor analysis presented in this paper, design strategies to compensate for important sensor imperfections are
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::484dd4589d3e465bcb6b8a0fa1250616
https://doi.org/10.1109/jsen.2012.2204321
https://doi.org/10.1109/jsen.2012.2204321
Autor:
M.R. Nabavi, Stoyan Nihtianov
Publikováno v:
IEEE Transactions on Industrial Electronics. 58:4414-4423
In this paper, a novel integrated eddy-current sensor interface is presented. The main targeted application is displacement measurement in an industrial environment, with resolution in the submicrometer range. A high excitation frequency of about 22
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::666aefdb06f93bb5c1a7f69d79e23a76
https://doi.org/10.1109/tie.2010.2098378
https://doi.org/10.1109/tie.2010.2098378
Autor:
M.R. Nabavi, Stoyan Nihtianov
This chapter discusses eddy-current displacement sensors (ECSs) – one of the most widely-used measurement techniques in harsh environments. First, in Section 4.1, we briefly discuss ECS applications in industry. In Section 4.2, the operation princi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0510ac3235a6b141be177e9be210199c
https://doi.org/10.1533/9780857099297.1.76
https://doi.org/10.1533/9780857099297.1.76
Publikováno v:
2011 IEEE International Instrumentation and Measurement Technology Conference.
This paper presents an improved interface for eddy current displacement sensor for accurate displacement measurement of thin targets in harsh environment. Two recently proposed state-of-the-art interfaces are analyzed and experimentally verified. The
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c51481d5a0889a94f763bd7bdd722840
https://doi.org/10.1109/imtc.2011.5944350
https://doi.org/10.1109/imtc.2011.5944350
Publikováno v:
ESSCIRC
This paper presents a high-performance interface for eddy current displacement sensors, intended for use in IC fabrication equipment. The interface consists of a low-power front-end oscillator and a synchronous demodulator. With an excitation frequen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::76208e1f95a464cc413a20340190450d
https://doi.org/10.1109/esscirc.2010.5619835
https://doi.org/10.1109/esscirc.2010.5619835