Zobrazeno 1 - 10
of 155
pro vyhledávání: '"M.J. Vasile"'
Publikováno v:
Precision Engineering. 27:59-69
Focused ion beam (FIB) sputtering is used to shape a variety of cutting tools with dimensions in the 15–100 μm range and cutting edge radii of curvature of 40 nm. The shape of each microtool is controlled to a pre-specified geometry that includes
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::198a2e1cf779113678bc07daa59b3884
https://doi.org/10.1016/s0141-6359(02)00188-5
https://doi.org/10.1016/s0141-6359(02)00188-5
Publikováno v:
Micron. 30:235-244
The application of focused ion beam (FIB) machining in several technologies aimed at microstructure fabrication is presented. These emergent applications include the production of micromilling tools for machining of metals and the production of micro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5a0231dab5e7f641f51e7e3f724423d6
https://doi.org/10.1016/s0968-4328(99)00008-6
https://doi.org/10.1016/s0968-4328(99)00008-6
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 10:674-679
The high resolution, three‐dimensional data provided by scanning probe microscopes makes them strong candidates for use in metrology. Many technological applications, such as integrated circuit metrology, require measurement precision to better tha
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::76dc8f2d1f8bf91c6b2c7a296de95552
https://doi.org/10.1116/1.577708
https://doi.org/10.1116/1.577708
Publikováno v:
Ultramicroscopy. :1616-1620
Precision probe metrology requires that the probe be carefully formed and measured. We demonstrate a method to accurately measure the shape of a probe in situ by scanning special measurement structures.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4c51dc18f2597e02a4feb868079bfada
https://doi.org/10.1016/0304-3991(92)90494-5
https://doi.org/10.1016/0304-3991(92)90494-5
Publikováno v:
Review of Scientific Instruments. 62:2167-2171
Probe tips for scanning tunneling microscopy have been sharpened using focused ion beam milling. Reproducible tips were formed on polycrystalline W and Pt‐Ir shanks, but this technique is not limited to these materials. The tips were found to have
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fe8c25508420bf1b27b600084fe53a8e
https://doi.org/10.1063/1.1142334
https://doi.org/10.1063/1.1142334
Publikováno v:
Proceedings of the 1997 16 Southern Biomedical Engineering Conference.
The authors' interest is to micromanufacture an oxygen microelectrode capable of measuring oxygen in a volume (on the order of a cubic micron or less). The open-tipped needle electrode is intended for measuring oxygen tension in biological media wher
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ac10cae08f9202e02fd0a6a244da5e0c
https://doi.org/10.1109/sbec.1997.583318
https://doi.org/10.1109/sbec.1997.583318
Publikováno v:
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
This paper describes the development of microchannel plate prototypes with aspect ratios of 20:1 and a variety of microchannel geometries. The LIGA process is utilized to fabricate nickel molds up to 150 /spl mu/m in height with planarized surfaces.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cbd7d8f83f2e0c749bfcfd35ae02b677
https://doi.org/10.1109/sensor.1997.613734
https://doi.org/10.1109/sensor.1997.613734
Autor:
Christie R. K. Marrian, D. A. Grigg, J. E. Griffith, M.J. Vasile, Greg Kochanski, Phillip E. Russell
Publikováno v:
SPIE Proceedings.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5e2383f22461bf14bef03ce5bb56be92
https://doi.org/10.1117/12.183192
https://doi.org/10.1117/12.183192
Autor:
M.J. Vasile
Publikováno v:
Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II.
This paper reports the results of efforts to find conditions under which FIB technology can be used to cross-section resist features. Evaluation of the accuracy of these cross-sections and the convenience or speed relative to cleaving is examined. FI
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a8fedea926c636d6f867850b00cdd8b8
https://doi.org/10.1117/12.136033
https://doi.org/10.1117/12.136033
Autor:
Diane K. Stewart, M.J. Vasile
Publikováno v:
Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II.
We have developed an ion-assisted gas etching (IAGE) technique which enhances existing focused ion beam (FIB) failure analysis (FA) cross-sectioning techniques. Preliminary results show enhanced sputter removal rate of certain materials, decoration o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a057af2d802ec5a0dfd046fc71612c00
https://doi.org/10.1117/12.136032
https://doi.org/10.1117/12.136032