Zobrazeno 1 - 10
of 18
pro vyhledávání: '"M.G.H. Meijerink"'
Publikováno v:
Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science. 220:1633-1643
This article reports on the design of a capacitive pressure sensor fabricated in non-silicon materials. The sensor consists of a thin membrane placed parallel to a rigid reference plane. The membrane and the reference plane act as two electrodes of a
Publikováno v:
Sensor Letters. 4:174-183
Publikováno v:
Sensors and Actuators B: Chemical. 68:331-334
Polyaniline, which was obtained as a dispersion from a commercial supplier, was used to prepare chemo-resistors. The sensors were prepared in a batch process by spin coating on a wafer with Au interdigitated electrode arrays (IDAs). The gas response
Publikováno v:
Sensors and actuators. A: Physical, 63(3), 163-168. Elsevier
A capacitive differential pressure sensor has been developed. The process used for the fabrication of the sensor is IC-compatible, meaning that the device potentially can be integrated on one chip with a suitable signal-conditioning circuit. A sensor
Publikováno v:
Journal of micromechanics and microengineering, 7(3), 250-252. Institute of Physics (IOP)
A capacitive differential pressure sensor has been developed. The process used for the fabrication of the sensor is IC-compatible, meaning that the device can potentially be monolithically integrated on one chip with a suitable signal conditioning ci
Publikováno v:
6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems-EuroSimE 2005, 18-20 April 2005, Berlin, Germany, 2005, 516-523
The application of numerical techniques for the design of a low cost pressure sensor is described. The numerical techniques assist in addressing issues related to the thermo-mechanical performance of the sensor. This comprises the selection of the ma
Publikováno v:
Sensors and Actuators, A: Physical, 123-124, 234-239
A capacitive pressure sensor was realized by means of a post-processing step on a low temperature co-fired ceramics (LTCC) substrate. The new sensor fabrication technology allows for integration of the sensor with interface circuitry and possibly als
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a5df89dddf193f534a319b09e86ade3a
http://resolver.tudelft.nl/uuid:33bcaf6c-26ad-4c2a-8b7a-b71468d1f98e
http://resolver.tudelft.nl/uuid:33bcaf6c-26ad-4c2a-8b7a-b71468d1f98e
Autor:
Milena Koudelka-Hep, D. J. Strike, Piet Bergveld, N. F. de Rooij, J. Hendrikse, M.G.H. Meijerink, Wouter Olthuis
Publikováno v:
Electrochemical and solid-state letters, 2(3), 1-2. The Electrochemical Society Inc.
Field effect transistor structures with a conducting polymer gate contact have been realized. An electrodeposition technique, suitable for a wide range of conducting polymers, was used. This is illustrated with the deposition of two different types o
Electronic noses are a new class of analytical instruments anticipated to have an impact in many areas. They are based around an array of sensors each having a partial specificity and thus producing an odour fingerprint that can be identified by a pa
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::001dec8dad2a19e18cdef058b1cd8559
https://infoscience.epfl.ch/record/138319
https://infoscience.epfl.ch/record/138319
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