Zobrazeno 1 - 10
of 10
pro vyhledávání: '"M.-A. Gre´tillat"'
Autor:
B. Valk, R. Ba¨ttig, O. Anthamatten, P. Vogel, N. F. de Rooij, M.-A. Gre´tillat, Cornel Marxer
Publikováno v:
Sensors and Actuators A: Physical. 61:449-454
The REMO (REflective MOdulator) component is a micromechanical light modulator fabricated by polysilicon surface micromachining. During operation the maximum tensile stress is 130 MPa and the maximum homogeneous electric field is 60 V μm −1 . The
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::713b5d6a740d49d202e0e05852849c5a
https://doi.org/10.1016/s0924-4247(97)80304-4
https://doi.org/10.1016/s0924-4247(97)80304-4
Autor:
Muralt, Paul1 paul.muralt@epfl.ch
Publikováno v:
Journal of the American Ceramic Society. May2008, Vol. 91 Issue 5, p1385-1396. 12p. 2 Black and White Photographs, 5 Diagrams, 1 Chart, 7 Graphs.
Autor:
Matsuoka, M., Nishide, M., Tai, T., Kim, J. W., Shima, H., Katoda, T., Funakubo, H., Nishida, K., Yamamoto, T.
Publikováno v:
Integrated Ferroelectrics; 2014, Vol. 157 Issue 1, p39-46, 8p
Publikováno v:
Lab on a Chip; May2007, Vol. 7 Issue 5, p644-646, 3p
Autor:
Jukam, Nathan, Sherwin, Mark S.
Publikováno v:
Applied Physics Letters; 7/7/2003, Vol. 83 Issue 1, p21, 3p, 1 Diagram, 3 Graphs
Publikováno v:
Surface & Interface Analysis: SIA; 1999, Vol. 27 Issue 5/6, p299-301, 3p
Autor:
Cocorullo, G., Della Corte, F. G.
Publikováno v:
Applied Physics Letters; 5/31/1999, Vol. 74 Issue 22, p3338, 3p, 1 Diagram, 3 Graphs
Publikováno v:
Applied Physics Letters; 4/28/1997, Vol. 70 Issue 17, p2318, 3p, 1 Black and White Photograph, 2 Graphs
Autor:
Eckert, Rolf, Freyland, J. Moritz, Gersen, Henkjan, Heinzelmann, Harry, Schu¨rmann, Gregor, Noell, Wilfried, Staufer, Urs, de Rooij, Nico F.
Publikováno v:
Applied Physics Letters; 12/4/2000, Vol. 77 Issue 23
Selected, peer reviewed papers from the Second International Conference on Frontiers of Manufacturing and Design Science, (ICFMD 2011), December 11-13, Taiwan
