Zobrazeno 1 - 1
of 1
pro vyhledávání: '"M. Wauk"'
Autor:
D. Burgin, R.M. Lee, Adrian Murrell, K. Harrington, K. Carpentier, M. Wauk, M. Scotney-Castle, N. Clarke
Publikováno v:
Proceedings of 11th International Conference on Ion Implantation Technology.
A new multi-position beamstop has been designed for the Precision Implant 9000 series of ion implanters, to reduce species cross-contamination when switching between B/sup +/, As/sup +/ and P/sup +/ implants. The beamstop features a rotatable flange
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::590b65a8a994670dcb33cdfdbd11270c
https://doi.org/10.1109/iit.1996.586159
https://doi.org/10.1109/iit.1996.586159
