Zobrazeno 1 - 2
of 2
pro vyhledávání: '"M. S. Zielinski"'
Autor:
M. S. Zielinski, David Poppitz, Andreas Graff, S. Breuer, Lutz Kirste, Christian Monachon, J. Berney
Publikováno v:
IRPS
This contribution assesses the potential of quantitative cathodoluminescence spectroscopy (CL) to speed up microelectronics development and failure analysis (FA). It does so through a recent example study performed on a High Electron Mobility Transis
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::66117dd8bffeee76c1409881af14142d
https://doi.org/10.1109/irps.2018.8353623
https://doi.org/10.1109/irps.2018.8353623
Autor:
Lutz Kirste, S. Breuer, David Gachet, Samuel Sonderegger, S. Muckenhirn, Andreas Graff, M. S. Zielinski, Jean Berney, David Poppitz, Christian Monachon
Publikováno v:
International Symposium for Testing and Failure Analysis.
Quantitative cathodoluminescence (CL) microscopy is a new optical spectroscopy technique that measures electron beam-induced optical emission over large field of view with a spatial resolution close to that of a scanning electron microscope (SEM). Co
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3ea8d09342a9fe1414c4aeaedafa8e2c
https://doi.org/10.31399/asm.cp.istfa2017p0349
https://doi.org/10.31399/asm.cp.istfa2017p0349