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pro vyhledávání: '"M. S. Dahlem"'
Autor:
A. Marinins, J. Kjellman, M. Prost, T. D. Kongnyuy, S. Saseendran, M. S. Dahlem, X. Rottenberg, R. Jansen, P. Soussan
Publikováno v:
Conference on Lasers and Electro-Optics.
We demonstrate a build-up consisting of SiN and a-Si photonics with a Bragg reflector, targeted at optical beamforming applications. We developed CMOS-compatible low-loss PVD SiN waveguides and grating couplers with enhanced efficiency.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::00ec267ea030740e1b3a1cb60ab24238
https://doi.org/10.1364/cleo_si.2022.sm4g.6
https://doi.org/10.1364/cleo_si.2022.sm4g.6
