Výsledky vyhledávání - "M. R. Gulett"

AES and XPS of silicon nitride films of varying refractive indices

Autor: J.R. Hoenigman, W.E. Moddeman, T. N. Wittberg, M. R. Gulett, C. R. Cothern

Publikováno v: Journal of Vacuum Science and Technology. 15:348-352

AES and XPS measurements of silicon nitride films with refractive indices ranging from 1.93 to 2.08 have been made. The films studied were grown on silicon (100) substrates by CVD using varying mixtures of silane and ammonia. Earlier AES studies of s

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::e3df2a0dbeca9d6609b85027eb387c81
https://doi.org/10.1116/1.569544

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