Zobrazeno 1 - 10
of 33
pro vyhledávání: '"M. R. Gulett"'
Publikováno v:
Journal of Vacuum Science and Technology. 15:348-352
AES and XPS measurements of silicon nitride films with refractive indices ranging from 1.93 to 2.08 have been made. The films studied were grown on silicon (100) substrates by CVD using varying mixtures of silane and ammonia. Earlier AES studies of s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e3df2a0dbeca9d6609b85027eb387c81
https://doi.org/10.1116/1.569544
https://doi.org/10.1116/1.569544
Autor:
Ding, Baoyong, Yu, Xiuru, Lu, Heng, Xiu, Xianwu, Zhang, Chao, Yang, Cheng, Jiang, Shouzhen, Man, Baoyuan, Ning, Tingyin, Huo, Yanyan
Publikováno v:
Journal of Applied Physics; 2019, Vol. 125 Issue 11, pN.PAG-N.PAG, 7p, 1 Diagram, 2 Charts, 4 Graphs
Characterization of low-pressure chemical-vapor-deposited and thermally-grown silicon nitride films.
Publikováno v:
Journal of Applied Physics; Jan1982, Vol. 53 Issue 1, p404-415, 12p
Publikováno v:
Surface & Interface Analysis: SIA; Jul2013, Vol. 45 Issue 7, p1188-1192, 5p
Publikováno v:
Surface & Interface Analysis: SIA; Jan2012, Vol. 44 Issue 1, p29-36, 8p
Autor:
Wachtman, John B.
Publikováno v:
Ceramic Engineering & Science Proceedings (9780470374931); 1990, p1701-1711, 11p
Autor:
Wachtman, John B.
Publikováno v:
Ceramic Engineering & Science Proceedings (9780470374870); 1989, p1403-1413, 11p
Publikováno v:
Plasma Science & Technology; 2002, Vol. 4 Issue 1, p1127-1134, 8p
Publikováno v:
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2001, Vol. 19 Issue 5, p2542-2548, 7p
Publikováno v:
Surface & Interface Analysis: SIA; 1993, Vol. 20 Issue 3, p221-227, 7p