Zobrazeno 1 - 2
of 2
pro vyhledávání: '"M. P. Manny"'
Autor:
S. K. Wiedmann, C. T. Chuang, D. F. Wendel, J. Warnock, M. P. Manny, R. V. Joshi, T. Chen, K. Ganssloser
Publikováno v:
Extended Abstracts of the 1990 International Conference on Solid State Devices and Materials.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a59e93902214d75f8acd2d546cb2fcff
https://doi.org/10.7567/ssdm.1990.d-8-3
https://doi.org/10.7567/ssdm.1990.d-8-3
Autor:
Yuan Taur, R. Viswanathan, M. P. Manny, Shalom J. Wind, R. M. Sicina, Chenming Hu, S. Cohen, R. A. Roy, Andrew Pomerene, J.J. Bucchignano, Y.-J. Mii, K. R. Milkove, Y. H. Lee, W. Chen, J. W. Stiebritz
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 13:2688
We explore the fabrication of complementary metal–oxide–semiconductor (CMOS) devices and circuits with a critical dimension of 100 nm and below using a variety of lithographic, processing, materials, and device design innovations. Device design p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b4c0228250a532f9862500e58fc37545
https://doi.org/10.1116/1.588050
https://doi.org/10.1116/1.588050