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pro vyhledávání: '"M. Muske"'
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Autor:
Stefan Gall, K.Y. Lee, Jan D'Haen, Bernd Rech, M. Berginski, Ivan Gordon, M. Muske, Jürgen Hüpkes
Publikováno v:
Thin Solid Films. 516:6869-6872
Thin film polycrystalline silicon (poly-Si) films have been fabricated by the aluminium-induced layer exchange (ALILE) process on ZnO:Al coated glass. The formation of the poly-Si films was observed during the annealing process using an optical micro
Publikováno v:
Thin Solid Films. 515:7465-7468
The aluminium-induced layer-exchange process allows to grow thin large-grained polycrystalline Si films on foreign substrates. A characteristic feature of these films is the preferential (100) orientation of Si grains, favourable for subsequent epita
Publikováno v:
Thin Solid Films. 515:3740-3744
The aluminium induced layer exchange process is used for growing crystalline Si films on amorphous substrates like glass, which are further epitaxially thickened and can be used for photovoltaic applications. In this work we investigated Al 2 O 3 mem
Autor:
E. Conrad, K. Petter, B. Rau, Jens Schneider, Klaus Lips, Stefan Gall, Michael Stöger-Pollach, M. Muske, Walther Fuhs, J. Klein, Peter Schattschneider, I. Sieber, K. Hübener
Publikováno v:
Thin Solid Films. :7-14
Large-grained polycrystalline silicon (poly-Si) films were prepared on glass using the 'seed layer concept' which is based on the epitaxial thickening of large-grained seed layers. The aluminium-induced layer exchange (ALILE) process was used to form
Publikováno v:
Journal of Non-Crystalline Solids. 352:980-983
In this work, Si grain nucleation during the aluminium-induced layer-exchange (ALILE) process is studied theoretically. A combined kinetic and thermodynamic model is derived to describe the nucleation and initial growth of Si grains. In the framework
Publikováno v:
Journal of Non-Crystalline Solids. 352:972-975
The formation of polycrystalline silicon (poly-Si) films by Al-induced crystallization (ALILE process) was studied in situ by optical microscopy. The characteristic feature of this process is that nucleation is strongly suppressed after an initial nu
Publikováno v:
Journal of Crystal Growth. 287:442-445
In this work, the initial stage of the aluminium-induced layer-exchange (ALILE) process is studied theoretically. The diffusion of silicon atoms from an amorphous Si layer into an Al layer through a permeable membrane prior to Si grain nucleation wit
Autor:
H.S. Reehal, Stefan Gall, I. Sieber, J. Klein, Jens Schneider, T. Quinn, Walther Fuhs, M. Muske, Andrey Sarikov
Publikováno v:
Journal of Crystal Growth. 287:423-427
In the aluminum-induced layer exchange process polycrystalline silicon thin films can be formed on foreign substrates at low temperatures. These films exhibit a preferential (1 0 0) crystal orientation, that depends on the annealing temperature. Furt
Publikováno v:
Thin Solid Films. 487:107-112
Annealing of amorphous silicon/aluminum layer stacks below the eutectic temperature leads to a layer exchange and concurrent crystallization of silicon. The resulting polycrystalline silicon layers are of great interest for large area thin film devic