Zobrazeno 1 - 2
of 2
pro vyhledávání: '"M. Mazhar IslamRaja"'
Publikováno v:
Journal of Applied Physics. 70:7137-7140
A general analytical model has been developed to calculate particle transport and spatial step coverage evolution within 2‐dimensional and 3‐dimensional microelectronic device structures during low‐pressure chemical vapor deposition. The model
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::50cd7e61e569bf9c5d3b25f24a02511e
https://doi.org/10.1063/1.349797
https://doi.org/10.1063/1.349797
Autor:
M. Mazhar IslamRaja, A. J. Bariya, K. C. Saraswat, M.A. Cappelli, J.P. McVittie, L. Moberly, R. Lahri
Publikováno v:
30th International Reliability Physics Symposium.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::43a2e874e4dd27c391ce9f40a99eca0d
https://doi.org/10.1109/irps.1992.363264
https://doi.org/10.1109/irps.1992.363264