Výsledky vyhledávání

Long-term outdoor reliability assessment of a wireless unit for air-quality monitoring based on nanostructured films integrated on micromachined platforms

Autor: Leandro Lorenzelli, Petteri Mettala, Paolo Milani, Risto Orava, M. Leccardi, Massimiliano Decarli, Emanuele Barborini

Publikováno v: Sensors (Basel, Switzerland)
Sensors
Volume 12
Issue 6
Pages 8176-8192
Sensors, Vol 12, Iss 6, Pp 8176-8192 (2012)

We have fabricated and tested in long-term field operating conditions a wireless unit for outdoor air quality monitoring. The unit is equipped with two multiparametric sensors, one miniaturized thermo-hygrometer, front-end analogical and digital elec

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d49adc538dd6b51260a314e88961c2a8
https://pubmed.ncbi.nlm.nih.gov/22969394

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Supersonic cluster beam deposition as novel tool addressing Nano-On-Micro issue

Autor: E. Barborini, P. Repetto, S. Vinati, M. Leccardi, M. Decarli, L. Lorenzelli, Paolo Milani

Publikováno v: TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.

Supersonic cluster beam deposition was used to integrate nanostructured oxide films onto silicon microstructures (microhotplates and microbridges), for batch production of conductimetric chemical sensors. Devices were characterized respect to oxidizi

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::abbed804f6cefc207f584bfa5e5270c9
https://doi.org/10.1109/sensor.2009.5285639

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Nanostructured Refractory Metal Oxide Films Produced by a Pulsed Microplasma Cluster Source as Active Layers in Microfabricated Gas Sensors

Autor: Paolo Milani, M. Leccardi, Pietro Repetto, Emanuele Barborini, Giacomo Bertolini, Caterina Ducati

Publikováno v: Japanese Journal of Applied Physics. 50:01AK01

Cluster-assembled nanostructured films of refractory metal oxides were produced by supersonic cluster beam deposition (SCBD) using a pulsed microplasma cluster source (PMCS). The growth of nanostructured films takes place at room temperature on subst

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::28a119aaf4727eb2c7ab7131f4f2cbd0
https://doi.org/10.1143/jjap.50.01ak01

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The influence of nanoscale morphology on the resistivity of cluster-assembled nanostructured metallic thin films

Autor: Paolo Milani, Emanuele Barborini, P. Repetto, G. Bertolini, Gabriele Corbelli, S. Vinati, M. Leccardi

Publikováno v: New Journal of Physics. 12:073001

We have studied in situ the evolution of the electrical resistivity of Fe, Pd, Nb, W and Mo cluster-assembled films during their growth by supersonic cluster beam deposition. We observed resistivity of cluster-assembled films several orders of magnit

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::43b9be29029bb5d3d2fc63410030cecf
https://doi.org/10.1088/1367-2630/12/7/073001

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Batch fabrication of metal oxide sensors on micro-hotplates

Autor: M. Leccardi, V. Guarnieri, Leandro Lorenzelli, Massimiliano Decarli, Caterina Ducati, P. Repetto, Emanuele Barborini, O. Rorato, Paolo Milani, G. Bertolini, S. Vinati

Publikováno v: Journal of Micromechanics and Microengineering. 18:055015

We report the parallel fabrication of miniaturized chemical sensors by the direct integration of nanostructured transition metal oxide films onto micro-hotplate platforms based on micromachined suspended membranes. This has been achieved by local dep

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::fd7b0606cb48c39b270cf10be3604ea2
https://doi.org/10.1088/0960-1317/18/5/055015

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