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pro vyhledávání: '"M. J. Buranbaev"'
Publikováno v:
Lecture Notes in Electrical Engineering ISBN: 9789400765153
By ion-plasma magnetron sputtering obtained diamond-like carbon films. Determined phase composition, surface morphology, measured the thickness of the films.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::92d057cba148d32117f451db60c0b046
https://doi.org/10.1007/978-94-007-6516-0_113
https://doi.org/10.1007/978-94-007-6516-0_113