Zobrazeno 1 - 10
of 30
pro vyhledávání: '"M. G. R. Thomson"'
Publikováno v:
CICC
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7b6396f8c41c3224f1c936400cb36f4b
https://doi.org/10.1109/cicc.2014.6946025
https://doi.org/10.1109/cicc.2014.6946025
Publikováno v:
Journal of Applied Physics. 81:461-465
The energy distributions of electron emission from a Schottky emitter have been studied at tip temperatures from 1450 to 1800 K and angular current densities from 0.1 to 240 μA/sr. We have observed broadening of the energy distribution, with increas
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0056be34d27be06e38ecfe4f6a1bb7d9
https://doi.org/10.1063/1.364081
https://doi.org/10.1063/1.364081
Publikováno v:
Microelectronic Engineering. 13:151-156
Achieving 0.25μm performance in a shaped electron beam tool has required not only enhancements to hardware and software, but also refined techniques for optimizing and monitoring resist image quality and spot placement accuracy. A compact test patte
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4412013df1aef1d2dd1fe895d88dda86
https://doi.org/10.1016/0167-9317(91)90066-m
https://doi.org/10.1016/0167-9317(91)90066-m
Autor:
E. Kratschmer, Tai-Hon Philip Chang, M. G. R. Thomson, H.S. Kim, S. A. Rishton, M. L. Yu, Kim Y. Lee
Publikováno v:
IVMC '95. Eighth International Vacuum Microelectronics Conference. Technical Digest (Cat. No.TH8012).
Summary form only given. Highly miniaturized electron beam columns based on a field emission source and microfabricated electron optical components have been developed. A 1 keV microcolumn operating with a miniaturized Zr/O/W Schottky emitter has bee
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::51f36cc21e40a937c938608600f35b62
https://doi.org/10.1109/ivmc.1995.487106
https://doi.org/10.1109/ivmc.1995.487106
Autor:
Hyun-Chul Kim, M. L. Yu, E. Kratschmer, Kim Y. Lee, S. A. Rishton, M. G. R. Thomson, Tai-Hon Philip Chang, Dieter P. Kern
Publikováno v:
SPIE Proceedings.
A fully functional electron beam microcolumn, 3.5 mm in length, demonstrating a probe size of 10 nm and beam current >= 1 nA at 1 keV has been successfully developed. This paper presents its current status and future directions. Potential application
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::64e33bd542882e26f41bf2c482beed65
https://doi.org/10.1117/12.221566
https://doi.org/10.1117/12.221566
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 15:2284
Experimental measurements of emission stability and energy distributions from a Schottky emitter have been conducted at a tip temperature range from 1330 to 1800 K. The changes of emission properties have been observed at reduced tip temperatures. No
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9895321dfb19fcb4463d52abbf5794c5
https://doi.org/10.1116/1.589630
https://doi.org/10.1116/1.589630
Autor:
B. W. Hussey, E. Kratschmer, S. Zolgharnain, Kam-Leung Lee, M. L. Yu, M. G. R. Thomson, Ho-Seob Kim, Tai-Hon Philip Chang, S. A. Rishton
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 14:3774
Lithography with an array of miniaturized scanning electron‐beam columns presents one of the most promising high‐throughput possibilities for fabrication of devices with feature sizes less than 100 nm. With scanning electron beams no mask is requ
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::42d0e5c5c95d394d6930cdb8c9403af8
https://doi.org/10.1116/1.588666
https://doi.org/10.1116/1.588666
Autor:
Tai-Hon Philip Chang, S. A. Rishton, B. W. Hussey, S. Zolgharnain, M. G. R. Thomson, M. L. Yu, Ho-Seob Kim, E. Kratschmer, Kam-Leung Lee
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 14:3792
A miniaturized 1 kV electron beam column with a 20×20 mm square footprint for application in arrayed lithography was developed. The actual beam forming optics measured from the electron emitter to the last electrode in the beam focusing Einzel lens
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e38a9c0bb06505f67a36dc471f64bb29
https://doi.org/10.1116/1.588669
https://doi.org/10.1116/1.588669
Autor:
M. G. R. Thomson
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 14:3802
The designs of the deflector and the final focusing lens in microcolumns are constrained by the extremely small physical size, and by the low energy of the beam. Because the overall column size and working distance are much smaller, the diameter of t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::796ec944d787ec33bf8011c33e0139c9
https://doi.org/10.1116/1.588671
https://doi.org/10.1116/1.588671
Autor:
M. G. R. Thomson
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 13:2455
A conventional field‐emission electron gun consists of a pointed cathode and an extraction electrode at a positive potential which produces a strong electric field at the cathode surface. Electrons are field‐emitted from the cathode, pass through
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::85f977ae2c9511a1b95dff7186309946
https://doi.org/10.1116/1.588020
https://doi.org/10.1116/1.588020