Zobrazeno 1 - 10
of 18
pro vyhledávání: '"M. F. Lemon"'
Autor:
Robert Clayton Wheland, Barbara Bobik Fones, Hoang Tran, Mureo Kaku, Luke W. Brubaker, Douglas J. Adelman, John J. Schmieg, Roger H. French, Jerald Feldman, M. F. Lemon, Michael T. Mocella, Weiming Qiu, Min K. Yang, Brian E. Fischel, Osami Nagao
Publikováno v:
Journal of Photopolymer Science and Technology. 20:729-738
Publikováno v:
Journal of the American Ceramic Society. 86:1885-1892
Precise and accurate knowledge of the optical properties of amorphous silica is important because of the increasing application of SiO2 in optical and electrooptical devices, including photolithography masks for semiconductor fabrication, recently as
Autor:
V. F. Cherstkov, Roger H. French, Robert Clayton Wheland, Nina I Delaygina, Viacheslav A. Petrov, Edward Zhang, M. F. Lemon, Joseph S. Gordon, Weiming Qiu
Publikováno v:
Journal of Fluorine Chemistry. 122:63-80
With the advent of 157 nm as the next photolithographic wavelength, there has been a need to find transparent and radiation durable polymers for use as soft pellicles. Pellicles are � 1 mm thick polymer membranes used in the photolithographic repro
Publikováno v:
Journal of the American Ceramic Society. 78:2243-2247
This paper describes a novel route for the low-temperature formation of mullite, from pillared smectite clay precursors, for use as fiber coatings in ceramic-matrix composites. In particular, alumina-pillared bentonite converts in part to mullite at
Publikováno v:
ChemInform. 26
This paper describes a novel route for the low-temperature formation of mullite, from pillared smectite clay precursors, for use as fiber coatings in ceramic-matrix composites. In particular, alumina-pillared bentonite converts in part to mullite at
Autor:
R. H. French, J. M. Rodríguez-Parada, M. K. Yang, M. F. Lemon, E. C. Romano, P. Boydell, Andreas W. Bett, Robert D. McConnell, Gabriel Sala, Frank Dimroth
Publikováno v:
AIP Conference Proceedings.
Concentrator photovoltaic (CPV) systems are designed to operate over a wide range of solar concentrations, from low concentrations of ∼1 to 12 Suns to medium concentrations in the range from 12 to 200 Suns, to high concentration CPV systems going u
Autor:
K. E. Krohn, M. F. Lemon, L. Brubaker, Robert Clayton Wheland, Hoang Vi Tran, D. Hardy, S. J. McLain, Mureo Kaku, O. Nagao, Roger H. French, Douglas J. Adelman, Jerald Feldman, Charles Y. Chen, Vladimir Liberman, Michael T. Mocella, B. E. Fischel, Min K. Yang, A. L. Shoe, B. Fones, Weiming Qiu
Publikováno v:
SPIE Proceedings.
To identify the most practical and cost-effective technology after water immersion lithography (Gen1) for sub-45 nm half pitches, the semiconductor industry continues to debate the relative merits of water double patterning (feasible, but high cost o
Autor:
Sheng Peng, Hoang Vi Tran, Weiming Qiu, M. F. Lemon, Jerald Feldman, Steve J. McLain, Michael Crawford, Min K. Yang, A. L. Shoe, Roger H. French, Robert Clayton Wheland, Doug J. Adelman
Publikováno v:
SPIE Proceedings.
Our studies of second generation immersion fluid candidates are moving beyond the discovery phase, and into addressing issues for their commercial application. Thus, we continue work to examine and fundamentally understand fluid transparency and refr
Publikováno v:
Applied Physics Letters. 70:2371-2373
This letter illustrates with AlN/CrN multilayers that optical superlattices, comprised of multilayers of a uv transmitting dielectric layer and a metallic layer, offer a systematic approach to design and fabricate partially transmitting, phase-shift
Publikováno v:
Physical Review B. 72
The interband optical properties of crystalline quartz and amorphous SiO2 in the vacuum ultraviolet VUV region have been investigated using combined spectroscopic ellipsometry and VUV spectroscopy. Over the range of 1.5–42 eV the optical properties