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pro vyhledávání: '"M. E. Alyoshin"'
Autor:
S. V. Kraevsky, D. I. Smirnov, N. N. Gerasimenko, M. E. Alyoshin, Timur Kulevoy, V. V. Khoroshilov, A. A. Temirov, P. А. Fedorov, D. N. Seleznev, P. Yakushin
Publikováno v:
The Review of scientific instruments. 83(2)
At the ion source test bench in Institute for Theoretical and Experimental Physics the program of ion source development for semiconductor industry is in progress. In framework of the program the Metal Vapor Vacuum Arc ion source for germanium and rh
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ded277211ec0660b94315d1dbd2400bf
https://pubmed.ncbi.nlm.nih.gov/22380345
https://pubmed.ncbi.nlm.nih.gov/22380345
