Zobrazeno 1 - 10
of 157
pro vyhledávání: '"M. D. Tabat"'
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 121:357-362
Over the past decade Pulsed Laser Deposition (PLD) has become a routine laboratory tool with which to grow a wide variety of complex chemical compounds. A recent review of the literature has shown that over 275 different compounds have been deposited
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::38ef72ee752784d8468f550148c5c836
https://doi.org/10.1016/s0168-583x(96)00434-x
https://doi.org/10.1016/s0168-583x(96)00434-x
Autor:
James A. Greer, M. D. Tabat
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 13:1175-1181
Pulsed laser deposition (PLD) has quickly emerged as a unique tool with which to grow high quality films of complex chemical compounds. It is estimated that at present the number of different materials which have been deposited by PLD now exceeds two
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e6aa068956f4d38233911b1001a6b91a
https://doi.org/10.1116/1.579857
https://doi.org/10.1116/1.579857
Autor:
James A. Greer, M. D. Tabat
Publikováno v:
MRS Proceedings. 388
Over the past few years Pulsed Laser Deposition (PLD) has become a popular technique for the deposition of a wide variety of thin films, and PLD systems are currently found in numerous industrial, government, university, and military laboratories. At
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8787666539f5be4fd0d0f9f75dd9bf03
https://doi.org/10.1557/proc-388-151
https://doi.org/10.1557/proc-388-151
Publikováno v:
MRS Proceedings. 345
High luminance (brightness) thin-film phosphor materials have potential use in a variety of applications including heads-up, helmet-mounted, and electroluminescent displays, as well as in emerging flat-panel displays based on field emitter technology
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f60014163dde9d6125259eb72915b2c0
https://doi.org/10.1557/proc-345-281
https://doi.org/10.1557/proc-345-281
Autor:
James A. Greer, M. D. Tabat
Publikováno v:
MRS Proceedings. 341
Yttria (Y2O3) films have been used for a variety of applications including MIS diodes, capacitors, insulators in transistor gates and electro-luminescent devices, and as optical AR coatings. Several conventional Physical Vapor Deposition (PVD) techni
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::03d83c29b10bdc230ca7fb34a35d7a96
https://doi.org/10.1557/proc-341-87
https://doi.org/10.1557/proc-341-87
Autor:
M. D. Tabat, G. L. Loper
Publikováno v:
Journal of Applied Physics. 58:3649-3651
We have demonstrated submicrometer‐resolution lithography by ultraviolet laser‐induced radical etching. We previously showed that this method can provide highly specific and efficient etching of various refractory metal/insulator and semiconducto
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::62c174a6e69c9172e7ec9c40b66e97bf
https://doi.org/10.1063/1.335748
https://doi.org/10.1063/1.335748
Autor:
M. D. Tabat, G. L. Loper
Publikováno v:
Applied Physics Letters. 46:654-656
Fluorine atoms, generated by the 193‐nm ArF laser photolysis of carbonyl difluoride, have been shown to be capable of efficiently and selectively etching polycrystalline silicon deposited on silicon dioxide. The highly specific and rapid removal of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::229d9b5e0037af600376ecbdf07671e2
https://doi.org/10.1063/1.95518
https://doi.org/10.1063/1.95518
Autor:
M D. Tabat, G L. Loper
Publikováno v:
SPIE Proceedings.
This paper reports work towards the development of new UV laser-induced radical-etching processes for the efficient and selective removal of: (1) polycrystalline (poly)-silicon layers deposited on silicon dioxide substrates, (2) tungsten layers depos
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::09cec4c9363593540f94ccad9ac95c11
https://doi.org/10.1117/12.939446
https://doi.org/10.1117/12.939446
Publikováno v:
Journal of Applied Physics; 9/28/2022, Vol. 132 Issue 12, p1-16, 16p
Publikováno v:
Optics Letters. 14:722
We describe what is to our knowledge the first experimental demonstration of internal wavelength conversion in the metastable Mg atomic filter. The filter operates at a Fraunhofer line, thereby offering intrinsic solar background rejection. Incoming
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e83cf5091cd89846116d3445b1755969
https://doi.org/10.1364/ol.14.000722
https://doi.org/10.1364/ol.14.000722