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Publikováno v:
Journal of Microelectromechanical Systems. 22:206-215
Geometry design can improve a capacitive radio-frequency microelectromechanical system switch's reliability by reducing the impacts of intrinsic biaxial stresses and stress gradients on the switch's membrane. Intrinsic biaxial stresses cause stress s
Publikováno v:
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).
Topology optimization is a rigorous and powerful method that should become a standard MEMS design tool - it can produce unique and non-intuitive designs that meet complex objectives and can dramatically improve the performance and reliability of MEMS
Autor:
Thomas W. Kenny, C.M. Jha, James Christian Salvia, S. Yoneoka, M. A. Philippine, Chia-Fang Chiang
Publikováno v:
2010 Solid-State, Actuators, and Microsystems Workshop Technical Digest.