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Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 265(2):515-520
This paper reports on Monte Carlo simulations of electrons in liquid water using a set of electron collision cross-sections constructed with data published recently. The track history of electrons having initial energy ranged from 1 keV to 10 keV is
Publikováno v:
Journal of Physics D Applied Physics. 40(8):2495-2498
Electron swarm parameters, such as the drift velocity and the ionization coefficient, in water vapour have been measured for relatively wide ranges in reduced electric fields (E/N) at room temperature. The drift velocity (Wm) was obtained based upon
Publikováno v:
Scopus-Elsevier
Publikováno v:
Thin Solid Films. 492:207-211
Silicon carbide film deposition on Si surface has been demonstrated by means of an ion-enhanced plasma chemical vapor deposition (CVD) using a tetramethylsilane + H 2 gas mixture. The plasma reactor used equips a triode system in which a substrate bi
Publikováno v:
Journal of Physics D: Applied Physics. 38:1918-1922
This paper reports four electron transport coefficients in tetramethylsilane (TMS, Si(CH3)4) vapour which is utilized in plasma-enhanced chemical vapour deposition (PECVD) of thin films such as SiC and SiN. The coefficients, namely the density-normal
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 207:373-380
In this study, we investigate electron transport properties in xenon gas by using a Monte Carlo technique for electrons with energies below 10 keV. First, we construct a set of electron collision cross sections with xenon by looking up cross section
Publikováno v:
IEEJ Transactions on Fundamentals and Materials. 122:479-484
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 451:588-595
A Boltzmann equation description of the electron behavior under the non-uniform field geometry is presented for modeling the gas amplification process of the proportional counters. Specifically, we apply the arrival-time spectra (ATS) method to deduc
Publikováno v:
Japanese Journal of Radiological Technology. 56:596-604