Výsledky vyhledávání

Physical characterization of sub-32-nm semiconductor materials and processes using advanced ion beam-based analytical techniques

Autor: S. Molis, Chiara Marchiori, D. K. Sadana, Vijay Narayanan, M. S. Gordon, Jean Fompeyrine, Lukas Czornomaz, T. Ando, Matthew Copel, Dirk Pfeiffer, Huiming Bu, Marinus Hopstaken, J. A. Wahl, Hemanth Jagannathan

Publikováno v: Surface and Interface Analysis. 45:338-344

The authors have addressed the application of advanced ion beam–based analytical techniques to various physical characterization aspects in sub-32-nm semiconductor front-end-of-line materials and processes. We have presented the application of 18 O

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::8e48faddf576a65a3b74c16882d5300a
https://doi.org/10.1002/sia.4916

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Sputtering behavior and evolution of depth resolution upon low energy ion irradiation of GaAs

Autor: Teya Topuria, Christian Gerl, Devendra K. Sadana, Philip M. Rice, Chiara Marchiori, M. Richter, M. J. P. Hopstaken, Dirk Pfeiffer, M. S. Gordon

Publikováno v: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 28:1287-1297

The authors have investigated the sputtering behavior and evolution of depth resolution upon low energy ion irradiation during secondary ion mass spectrometry (SIMS) depth profiling of GaAs. They presented a systematic and quantitative study of the i

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::8326febdf0b4c747f9a7ff6e1a270fbf
https://doi.org/10.1116/1.3514117

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Pathway to the PiezoElectronic Transduction Logic Device

The information age challenges computer technology to process an exponentially increasing computational load on a limited energy budget - a requirement that demands an exponential reduction in energy per operation. In digital logic circuits, the swit

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::14714f2ef5dedef4bb9f3d1d14d2f6f3

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Titration of submonolayer Au growth on Si(111)

Autor: M. S. Gordon, S. J. van der Molen, Matthew Copel, Jaap Kautz, Rudolf M. Tromp

Publikováno v: Physical Review B : Condensed Matter, 89(3), 035416
Physical Review B : Condensed Matter

We study and analyze the growth of submonolayers of Au on Si(111) by a complementary set of surface techniques. Specifically, we focus on the $5\ifmmode\times\else\texttimes\fi{}2$ and the $\ensuremath{\alpha}\sqrt{3}\ifmmode\times\else\texttimes\fi{

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b45a3bee17b10b9a66e3f722b212dc86
http://hdl.handle.net/1887/51888

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PREVAIL e-beam stepper alpha tool

Publikováno v: Microelectronic Engineering. :163-172

PREVAIL is the high throughput e-beam projection approach to NGL, which IBM is pursuing in cooperation with Nikon as alliance partner. Key lithographic building blocks of the technology have been demonstrated experimentally with a proof-of-concept (P

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::f73add378015643302f32ff4c0da7df4
https://doi.org/10.1016/s0167-9317(01)00508-1

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PREVAIL—Electron projection technology approach for next-generation lithography

Autor: Christopher F. Robinson, M. S. Gordon, R. S. Dhaliwal, Steven D. Golladay, J. E. Lieberman, J. D. Rockrohr, David J. Pinckney, William A. Enichen, Rodney A. Kendall, Hans C. Pfeiffer, E. V. Tressler, Werner Stickel

Publikováno v: IBM Journal of Research and Development. 45:615-638

This paper is an overview of work in the IBM Microelectronics Division to extend electron-beam lithography technology to the projection level for use in next-generation lithography. The approach being explored--Projection Reduction Exposure with Vari

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::5b0afdc808ab4c82d7ad8d28b3ab5fbc
https://doi.org/10.1147/rd.455.0615

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Outpatient Biochemotherapy With Interleukin-2 and Interferon Alfa-2b in Patients With Metastatic Malignant Melanoma: Results of Two Phase II Cytokine Working Group Trials

Autor: M. S. Gordon, Wei Du, James W. Mier, Kim Margolin, Jeffrey A. Sosman, C. Appel, J. Dutcher, P. Sorokin, R. I. Fisher, Joseph I. Clark, M. Lotze, G. Weiss, M. Atkins, L. Flaherty

Publikováno v: Journal of Clinical Oncology. 19:3194-3202

PURPOSE: The Cytokine Working Group performed a randomized phase II trial of two outpatient biochemotherapy regimens to identify an outpatient regimen with high antitumor activity and less toxicity than inpatient regimens which might be compared with

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::affa3cedd763b16e101a6e431f686ded
https://doi.org/10.1200/jco.2001.19.13.3194

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Correlation measurements of light charged particles emitted fromS32+27Al reactions at energies of 105 MeV and 215 MeV

Autor: G. Gilfoyle, R. L. McGrath, V. Datar, Graham F. Peaslee, C.J. Gelderloos, J. Sarafa, Paul DeYoung, James Alexander, N.N. Ajitanand, M. S. Gordon

Publikováno v: Physical Review C. 52:3488-3491

Previous work has examined light particle correlations from O+Al reactions over a range of energies within a framework of statistical emission from a composite source. The source of these light particles was assumed to be an excited composite nucleus

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::c22ade28b571ee870bfcfb41a29c6562
https://doi.org/10.1103/physrevc.52.3488

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