Zobrazeno 1 - 1
of 1
pro vyhledávání: '"M I Azhgikhin"'
Publikováno v:
Journal of Physics: Conference Series. 2291:012022
The paper studies the influence of the power supply output inductance on the arc parameters, which form on the sputtered target surface during high-power impulse magnetron sputtering. The arc energy, lifetime and maximum current are measured by the u
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f2d78360de1f3f5cd9b15440ca53ba71
https://doi.org/10.1088/1742-6596/2291/1/012022
https://doi.org/10.1088/1742-6596/2291/1/012022
